Beam-induced changes in the scanning electron microscopy of poly(oxymethylene)

Abstract

Samples of injection-moulded Delrin of a particular known morphology were examined in the scanning electron microscope. It was found that the beam affected the specimen in certain characteristic ways, the raster leaving a permanent imprint on the sample surface. By considering the nature of the irradiation process in the scanning electron microscope the amount and type of beam damage could be quantitatively correlated with the operating variables of the instrument. It is hoped that this will provide the groundwork for similar investigations on other systems. The importance of understanding and controlling beam-induced effects in the interpretation of scanning electron microscope images is clearly brought out by the present study.

The nature of the beam damage bears a relation to the texture of the sample as inferred by other means. Thus the scanning electron microscope can serve as a device for achieving controlled beam etching in service of structure studies.