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Depth profile analysis of minor elements by GD-OES: Applications to diffusion phenomena

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Abstract.

 Depth distributions of minor elements in systems in which diffusion takes place are discussed together with the methods of determinating these distributions by GD-OES depth profiling. The quantification method is illustrated using as example Si, Fe, Zn and Sn diffusion/segregation phenomena in a Ti-thin-film/Al-substrate system with an Al3Ti interface diffusion layer grown at elevated temperatures.

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Received: 15 October 1994 / Revised: 16 February 1995 / Accepted: 17 March 1995

Correspondence to: Z. Weiss

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Weiss, Z., Musil, J. & Vlc˘ek, J. Depth profile analysis of minor elements by GD-OES: Applications to diffusion phenomena. Fresenius J Anal Chem 354, 188–192 (1996). https://doi.org/10.1007/PL00012709

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  • DOI: https://doi.org/10.1007/PL00012709

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