Abstract
The refractive indices of dielectric oxide materials coatings depend on a large number of factors e.g. rate of evaporation, pressure of reactive gas, temperature of substrate etc. A brief review of the effects of some of these parameters on the performance of the films has been given. The process control parameters have been optimized on Balzers Vacuum coating unit for TiO and SiO coatings and hard coated laser mirrors have been 2 2 Fabricated by using these optimized parameters. The reflectance characteristics of these Mirrors have been measured on Cary double beam spectrophotometer and agree well with the theoretical values.
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A part of this work was presented at the 3rd Symposium on lasers and Applications held at the Indian Institute of Technology, Kanpur, India, 1983.
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Chopra, K.N., Narasimham, K.V., Tayal, S.S. et al. On the Optimization of Process Control Parameters for the Fabrication of Hard Coated Laser Mirrors. J Opt 15, 1–5 (1986). https://doi.org/10.1007/BF03549139
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DOI: https://doi.org/10.1007/BF03549139