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Vapor deposition: The first hundred years

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  • Vapo-Metallurgy Article I
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Abstract

Highlights in the development of the CVD process, and some of its current applications. It will play a much more important role in metallurgical-processing operations

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Authors and Affiliations

  1. Vapor Deposition Div., Battelle Memorial Institute, Columbus, USA

    E. M. Sherwood (Associate Chief) & J. M. Blocher Jr. (Chief)

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  1. E. M. Sherwood
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  2. J. M. Blocher Jr.
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Sherwood, E.M., Blocher, J.M. Vapor deposition: The first hundred years. JOM 17, 594–599 (1965). https://doi.org/10.1007/BF03378363

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