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Vapor Phase Metallurgy and Ceramics

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Abstract

Vapor phase metallurgical and ceramic techniques involve the production of thin-film or massive-material deposits by means of the surface-catalyzed thermal decomposition or hydrogen reduction of a variety of volatile compounds in their gaseous or vapor phase.

The reasons for employing vapor phase plating techniques, the essentials of the processes involved, and the current systems and operating principles are discussed. Some of the more significant advances in the vapor phase technology of metals, semiconductors, and non-metals since 1955 are reviewed, and the future of the technology is discussed.

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Authors and Affiliations

  1. Electronics & Alloys Inc., Ridgefield, N. J., USA

    R. Bakish (member of AIME) & C. A. Gellar

  2. Alloyd Electronics Corp., USA

    I. Marinow

Authors
  1. R. Bakish
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  2. C. A. Gellar
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  3. I. Marinow
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Bakish, R., Gellar, C.A. & Marinow, I. Vapor Phase Metallurgy and Ceramics. JOM 14, 770–774 (1962). https://doi.org/10.1007/BF03378193

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