Skip to main content
Log in

The Role of Thin Film Materials on the Technology of Integrated Circuit Fabrication

  • Physical Metallurgy and Material
  • Overview
  • Published:
JOM Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. R.F. Bunshah et al., Eds., Deposition Technologies for Films and Coatings, Noyes Publications, Park Ridge, New Jersey, 1982.

    Google Scholar 

  2. W. Kern, “Semiconductor International,” March 1982, pp. 89–103.

    Google Scholar 

  3. C.C. Tang, J.K. Chu and D.W. Hess, “Solid State Technology,” March 1983, pp. 125–128.

    Google Scholar 

  4. P.B. Ghate, Thin Solid Films, Vol. 93, pp. 359–383, 1982.

    Article  Google Scholar 

  5. K.N. Tu and R. Rosenberg, Eds., Treatise on Materials Science and Technology, Vol. 24: Preparation and Properties of Thin Films, Academic Press, New York, 1982 (Chapter 7).

    Google Scholar 

  6. Marc-A Nicolet, VLSI Electronics—Microstructure Science—Vol. 6: Materials and Process Characterization, Ed. by N.G. Einspruch, Academic Press, New York, 1983 (Chapter 6).

  7. S.P. Murarka, Suicides for VLSI Applications, Academic Press, New York, 1983.

    Google Scholar 

  8. S.S. Lau et al., Laser and Electron Beam Processing of Materials, Ed. by C.W. White and P.S. Peercy, Academic Press, New York, 1980, pp. 511–523.

  9. B.Y. Tsaur et al., J. Appi. Phys., Vol. 52, p. 5243, 1981.

    Article  Google Scholar 

  10. G. Ottaviani, K.N. Tu and J. Mayer, Appi. Phys. Lett, Vol. 50, p. 331, 1980.

    Article  Google Scholar 

  11. A.K. Sinha, Thin Solid Films, Vol. 90, pp. 271–285, 1982.

    Article  Google Scholar 

  12. S. Vaidya and A.K. Sinha, Thin Solid Films, Vol. 75, pp. 253–259, 1981.

    Article  Google Scholar 

  13. W.C. Benzing, Electronics, pp. 116–119, August 25, 1982.

    Google Scholar 

  14. E.C. Douglas, Solid-State Technology, May 1981, pp. 65–72.

    Google Scholar 

  15. R.S. Nowicki et al., Semiconductor International, March 1982, p. 105.

    Google Scholar 

Download references

Authors

Additional information

Federico O. Sequeda received his Ph.D. in materials science at the University of Illinois. He is currently Manager at the Materials Technology Department, Central Scientific Services of the IBM Research Lab in San Jose, California.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Sequeda, F. The Role of Thin Film Materials on the Technology of Integrated Circuit Fabrication. JOM 37, 54–60 (1985). https://doi.org/10.1007/BF03258746

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF03258746

Keywords

Navigation