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NMAB Report on Plasmas

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References

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Authors’ Note: This paper is adapted from the National Materials Advisory Board (NMAB) report Plasma Processing of Materials. The committee on Plasma Processing of Materials, which prepared the report, included Merton C. Flemings, Massachusetts Institute of Technology; Julian Szekely, Massachusetts Institute of Technology; Noel Jarrett, Alcoa Research; Bernard H. Kear, Exxon Research and Engineering Company; Emil Pfender, University of Minnesota; Earl Thompson, University of Virginia; Philip H. Wilks, Plasma Materials Incorporated; Diran Apelian, Drexel University; Cyril Joseph Mogab, AT&T-Bell Laboratories; Ward Roman, United Technologies Research Center; and Harold F. Winters, IBM. The text of the report, NMAB-415, may be obtained from the Defense Technical Information Center, Cameron Station, Alexandria, Virginia 22312.

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Jarrett, N., Szekely, J. & Roman, W. NMAB Report on Plasmas. JOM 38, 41–45 (1986). https://doi.org/10.1007/BF03257954

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