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profile measurement by projecting two gratings with different pitches

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Abstract

A new method for measuring objects with steps is proposed in which two gratings with different pitches are projected on the object surLace. The method is demonstrated with sinusoidal gratings made of laser interference fringes and also sinusoidal gratings formed by liquid crystal controlled by computer. An object with step height of 20 mm is measured with standard variation below 3%.

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References

  1. S. Kakunai, K. Iwata, M. Hasegawa and T. Sakamoto: Proc. SPIE 1163 (1989) 128.

    Article  ADS  Google Scholar 

  2. V. Srinivasan, H.C. Liv and M. Halioua: Appl. Opt. 23 (1984) 3105.

    Article  ADS  Google Scholar 

  3. K. Creath: Progress in Optics XXV1, ed. E. Wolf (Elsevier Science, New York, 1988) Chap. V, p. 345.

    Google Scholar 

  4. J.H. Bruning, D.R. Herriott, J.E. Gallagher, A.D. White and D.J. Brangaccio: Appl. Opt. 13 (1974) 2693.

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. Department of Mechanical Engineering, Faculty of Engineering, Himeji Institute of Technology, Himeji, 671-22, Japan

    Satoshi Kakunai & Tohru Sakamoto

  2. Department of Mechanical Engineering, College of Engineering, University of Osaka Prefecture, Osaka, 593, Japan

    Koichi Iwata

Authors
  1. Satoshi Kakunai
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  2. Koichi Iwata
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  3. Tohru Sakamoto
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Kakunai, S., Iwata, K. & Sakamoto, T. profile measurement by projecting two gratings with different pitches. Optical Review 1, 296–298 (1994). https://doi.org/10.1007/BF03254890

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  • DOI: https://doi.org/10.1007/BF03254890

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