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Growing GaN by plasma-assisted molecular-beam epitaxy

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Abstract

The III–V compounds GaN and AlN have a variety of interesting properties that would prove useful in new applications. This article describes work aimed at the successful epitaxial growth of GaN on silicon substrates and details some of the novel applications that could be the result of such work.

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References

  1. S. Nakamura, M. Senoh, and T. Mukai, Appl. Phys. Lett., 62 (1993), p. 2390; S. Nakamura, T. Mukai, and M. Senoh, Jpn.J. Appl. Phys., 30 (1991), p. L1998.

    CAS  Google Scholar 

  2. Porowski (Paper presented at the International Conference on Silicon Carbide and Related materials, Washington, D.C., 1993).

  3. S. Strite and H. Morkoç, J. Vac. Sci. Technol. B, 10 (1992), p. 1237.

    CAS  Google Scholar 

  4. T.P. Humphreys et al., Mat. Res. Soc. Symp. Proc, 162 (1990), p. 531; T. Sasaki and S. Zembutsu, J. Appl. Phys., 61 (1987), p. 2533.

    CAS  Google Scholar 

  5. S. Nakamura, T. Mukai, and M. Senoh, J. Appl. Phys., 71 (1992), p. 5543.

    CAS  Google Scholar 

  6. M.E. Lin et al., Appl. Phys. Lett., 62 (1993), p. 3479.

    CAS  Google Scholar 

  7. M. Rubin et al., Appl. Phys. Lett., 64 (1994), p. 64.

    CAS  Google Scholar 

  8. K.S. Stevens et al., J. Vac. Sci. Technol. B (to be published in March 1994).

    Google Scholar 

  9. WJ. Meng, J. Heremans, and Y.T. Cheng, Appl. Phys. Lett., 59 (1991), p. 20

    CAS  Google Scholar 

  10. N. Itoh and K. Okamoto, J. Appl. Phys., 63 (1988), p. 1486.

    CAS  Google Scholar 

  11. Y. Koide et al., Jpn. J. Appl. Phys., 27 (1988), p. 1156.

    CAS  Google Scholar 

  12. P. Scherrer, Gottinger Nachr., 2 (1918), p. 98.

    Google Scholar 

  13. A. Ohtani, K.S. Stevens, and R. Beresford (Paper to be presented at Spring Meeting of the materials Research Society, April 1994).

  14. R.C. Powell et al., J. Appl. Phys., 73 (1993), p. 189.

    CAS  Google Scholar 

  15. H.M. Mott-Smith and I. Langmuir, Phys. Rev., 28 (1926), p. 727.

    CAS  Google Scholar 

  16. J.F. Schetzina (Paper presented at the 1993 North American Conference on Molecular Beam Epitaxy, Stanford University, Stanford, CA).

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Beresford, R. Growing GaN by plasma-assisted molecular-beam epitaxy. JOM 46, 54–58 (1994). https://doi.org/10.1007/BF03220653

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  • DOI: https://doi.org/10.1007/BF03220653

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