Zusammenfassung
Es werden zwei neuartige Ultraschall-Arrayantennen für die Medizintechnik vorgestellt, die u. a. mit Hilfe von Finite-Element-Berechnungen entwickelt wurden und mit Methoden der Mikrotechnik gefertigt werden. Die erste Antenne basiert auf dem piezoelektrischen Wandlungsprinzip und kann gleichzeitig für Bildgebung und Tumortherapie eingesetzt werden. Die zweite Antenne besteht aus kapazitiven Wandlern, die durch einen Oberflächenmikromechanik-Prozeß hergestellt werden und eine Integration der Treiber- und Empfangselektronik ermöglichen.
Abstract
Two new ultrasound array antennas for medical applications are presented. These antennas are developed utilizing finite element simulations and they are manufactured by micromachining techniques. The first antenna is based on the piezoelectric transducer principle and can be simultaneously used for imaging and tumor therapy. The second antenna consists of electrostatic transducers, which are manufactured by surface micromachining and which allow an integration of the driver and receiver electronics.
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Schrifttum
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Sheljaskov, T., Niederer, K., Lerch, R. et al. Ultraschall-Arrayantennen in Mikrotechnik. Elektrotech. Inftech. 115, 370–377 (1998). https://doi.org/10.1007/BF03159606
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DOI: https://doi.org/10.1007/BF03159606
Schlüsselwörter
- Mikromechanik
- Ultraschall-Arrayantenne
- Bipolar-CMOS-Prozeß
- Oberflächenmikromechanik
- Ultraschallbildgebung
- Ultraschalltherapie