Skip to main content
SpringerLink
Log in

Collision cascades and the disturbed zone during sputtering processes (model computation)

  • Communicatio Brevis
  • Published:
Acta Physica Academiae Scientiarum Hungaricae

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. M. T. Robinson, Phil. Mag.,12, 741, 1965. Phil. Mag.,17, 639, 1968.

    Article  ADS  Google Scholar 

  2. P. Sigmund, Appl. Phys. Lett.,17, 117, 1969.

    Google Scholar 

  3. P. Sigmund, Phys. Rev.,184, 383, 1969.

    Article  ADS  Google Scholar 

  4. J. Giber, J. Kazsoki andL. Koblinger, Acty Phys. Hung.,44, 227, 1978.

    Article  Google Scholar 

  5. M. W. Werner, Vacuum,24, 493, 1974.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Physics, Technical University, Budapest

    J. Giber, J. Kazsoki & L. Koblinger

Authors
  1. J. Giber
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Kazsoki
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. L. Koblinger
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Giber, J., Kazsoki, J. & Koblinger, L. Collision cascades and the disturbed zone during sputtering processes (model computation). Acta Physica 45, 275–277 (1978). https://doi.org/10.1007/BF03157256

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF03157256

Keywords

Search

Navigation