Skip to main content
SpringerLink
Log in

Few keV energy neutral atoms in the beam of a radio frequency ion source

Нейтральные атомы с энергией несколько кэв в пучке радиочастотного ионного источника

  • Published:
Acta Physica Academiae Scientiarum Hungaricae

Abstract

The ratio of neutral atom “current” to ion current (I 0/I +) has been investigated in the beam of a r.f. ion source as a function of oscillator power and extraction voltage using hydrogen and helium r.f. discharges. Neutral particles had an energy of few keV according to the extraction voltage. For detecting neutral particles two methods have been employed: a calorimetric method and a method based on secondary electron emission. TheI 0/I + ratios were found between 0.75–0.35 in the case of hydrogen and between 0.82–0.57 with helium. A simple method for decreasing the neutral component has also been tested.

Резюме

Было определено отношение

в пучке радиорастотного ионного источника в зависимости от мощности осциллятора и напряжения вытягивания при использовании высокочастотного разряда водорода и гелия. Нейтральные частицы — соответственно напряжению вытягивания — имеют несколько кэв энергии. Для регистрации нейтральных частиц применялись два метода: калориметрический метод и измерение эмиссии вторичньх электронов. В случае пучка водорода получилось отношениеI 0/I + в интервале 0,75–0,35, а в случае гелия 0,82–0,57. Бьл проверен простой метод уменьшения нейтральной компоненть.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. E. M. Kellogg, IEEE,NS-12, 242, 1965.

    Google Scholar 

  2. J. D. Craggs, Proc. Phys. Soc.,54, 245, 1942.

    Article  ADS  Google Scholar 

  3. E. K. Inall, Proc. Phys. Soc.,64, 1068, 1951.

    Article  ADS  Google Scholar 

  4. K. Firth andD. R. Chick, Journ. Sci. Instr.,30, 117, 1953.

    Article  ADS  Google Scholar 

  5. P. C. Thonemann andE. R. Harrison, AERE GP/R, 1190.

  6. D. R. Chick andF. J. Miranda, Journ. Sci. Instr.,29, 340, 1952.

    Article  ADS  Google Scholar 

  7. J. Nagy ATOMKI Közl.,7, 209, 1965.

    Google Scholar 

  8. N. R. Daly, R. E. Powell andR. G. Ridley, Nucl. Instrum. Meth.,36, 226, 1965.

    Article  ADS  Google Scholar 

  9. A. B. Wittkower, P. M. Rose, R. P. Bastide andN. B. Brooks, Phys. Rev.,136, A1254, 1964.

    Article  ADS  Google Scholar 

  10. L. Marton andC. Marton, Advances in Electronic and Electron Physics,21, 101, 1965, Academic Press, New York and London.

    Google Scholar 

  11. K. Morita, H. Akimune andT. Suita, Jap. J. Appl. Phys.,5, 511, 1966.

    Article  ADS  Google Scholar 

  12. P. Mahadevan, J. K. Layton, A. R. Comeaux andD. B. Medved, J. Appl. Phys.,34-b 2810, 1963.

    Article  ADS  Google Scholar 

  13. G. W. Mc Clure andD. L. Allensworth, Rev. Sci. Instr.,37, 1511, 1966.

    Article  ADS  Google Scholar 

  14. D. Bódizs, ATOMKI Közl.,10, No 3. 29, 1968.

    Google Scholar 

  15. C. H. Weijsenfeld, Philips Research Rep. Suppl., No. 2, 26, 1967.

    Google Scholar 

  16. V. G. Telykovskiy, DAN SSSR,108, 444, 1956.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Nuclear Research of the Hungarian Academy of Sciences, Debrecen

    D. Bódizs

Authors
  1. D. Bódizs
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Dedicated to Prof.A. Szalay on his 60th birthday.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bódizs, D. Few keV energy neutral atoms in the beam of a radio frequency ion source. Acta Physica 28, 145–153 (1970). https://doi.org/10.1007/BF03055158

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF03055158

Keywords

Search

Navigation