Synthesis of ZnO nanowalls on Al2O3 (0001) by catalyst-free metalorganic chemical vapor deposition

Abstract

We report the synthesis of epitaxially aligned ZnO nanowalls on Al2O3 (0001) by metalorganic chemical vapor deposition without using any metal catalyst. ZnO nanowalls of 60–150 nm thickness are uniformly assembled on the substrate. A small amount of ZnO nanowires additionally grow and are coupled with the ZnO nanowalls. Interestingly, the crystals in the ZnO nanowalls are aligned in both the out-of-and in-plane direction. A strong UV emission at around 380 nm, observed in a room temperature photoluminescence spectrum, indicates excellent optical quality of the ZnO nanowalls.

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Correspondence to Sang Sub Kim.

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Park, J.Y., Lee, D.J., Yun, Y.S. et al. Synthesis of ZnO nanowalls on Al2O3 (0001) by catalyst-free metalorganic chemical vapor deposition. Met. Mater. Int. 11, 165–168 (2005). https://doi.org/10.1007/BF03027461

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Keywords

  • ZnO
  • nanostructures
  • semiconducting II–VI materials
  • metalorganic chemical vapor deposition