Abstract
This paper describes first the basicmoems technologies and attempts to point out the various degrees of freedom that are available for the designer. Then, it will review some of the most important architectures ofmoems demonstrated up to now, for optical switching and wavelength management inWDM networks. These technologies are also very promising for optical connectorization, and could open the way to new components that could be cheap enough for being used at the subscriber level. An analysis of the present status ofmoems technologies, the main short term issues, and some development prospects will finally be given.
Résumé
Cet article décrit tout d’abord les technologies de base utilisées pour lesmoems et tente de montrer les degrés de liberté dont le concepteur dispose. Ensuite, il passe en revue les architectures des principaux composantsmoems démontrés à ce jour pour la commutation optique ou bien la gestion de longueurs d’ondes dans les réseaux optiquesWDM. Ces technologies sont également très prometteuses pour les problèmes de «connectorisation» optique, et pourraient ouvrir la voie à des composants aux coûts suffisamment réduits pour être utilisés au niveau de l’abonné. Une analyse de l’état actuel des technologiesmoems, les principaux défis à court terme, ainsi que quelques perspectives de développement sont ensuite discutés.
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de Labachelerie, M., Thevenet, J. MOEMS devices and their applications to optical telecommunication systems. Ann. Télécommun. 58, 1401–1423 (2003). https://doi.org/10.1007/BF03001737
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DOI: https://doi.org/10.1007/BF03001737
Key words
- Microstructure
- Micromechanics
- Optoelectronics
- Microelectronic fabrication
- Actuator
- Mirror
- Optical switch
- Wavelength division multiplexing
- Frequency filtering
- Optical modulator
- Optical component
- Packaging
- Connectics
- State of the art