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Optimal design and development of electromagnetic linear actuator for mass flow controller

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Abstract

In this paper, we constructed the analytic model of control valve as a function of electric and geometric parameters, and analyzed the influence of the design parameters on the dynamic characteristics. For improving the dynamic characteristics, optimal design is conducted by applying sequential quadratic programming method to the analytic model. This optimal design aims to minimize the response time and maximize force efficiency. By this procedure, control valve can be designed to have fast response in motion.

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Abbreviations

A :

Area of air gap

d c :

Coil diameter

F emag :

Electromagnetic force

g :

Gravitational constant

i :

Current of coil winding

K p :

Proportional constant

K s :

Spring constant

L e :

Inductance of the external circuit

l c :

Average one turn length of coil

m p :

Mass of the plunger

n :

Turn of coil

R :

Resistance of coil

R m :

Magnetic reluctance

T c :

Temperature of coil

T sum :

Sum of rising and falling time

V :

Applied voltage

v :

Velocity of plunger

W 1,W 2 :

Weighting factor of cost function

x g :

Air gap length

X p :

Minimum stroke of plunger

Ø:

Flux

λ:

Flux linkage

μo :

Permeability of air

p:

Resistivity of coil

References

  • Grace, A., 1990,Optimization Toolbox User’s Guide., The Math Works Inc.

  • Hanselman, D. C, 1994,Brushless Permanent-Magnet Motor Design., McGraw-Hill Inc.

  • Hinkle, L. D. and Mariano, C. F., 1991, “Toward Understanding the Fundamental Mechanisms and Properties of the Thermal Mass Flow Controller,” /of Vacuum Science Technology. A9 (3).

  • Holman. J. P., 1981,Heat Transfer., MaGraw-Hill Inc.

  • Krause, P. C, 1986,Analysis of Electric Machinery., MaGraw-Hill Book Company.

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Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, 373-1Kusung-Dong,YusongGu, 305-701, Taejon, Korea

    Myung- Jin Chung & Dae- Gab Gweon

Authors
  1. Myung- Jin Chung
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  2. Dae- Gab Gweon
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Corresponding author

Correspondence to Dae- Gab Gweon.

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Chung, M.J., Gweon, D.G. Optimal design and development of electromagnetic linear actuator for mass flow controller. KSME International Journal 17, 40–47 (2003). https://doi.org/10.1007/BF02984284

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  • DOI: https://doi.org/10.1007/BF02984284

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