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Magnetically suspended contact-free linear actuator for precision stage

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Abstract

With the development of precision manufacturing technologies, the importance of precision positioning devices is increasing. Conventional actuators, dual stage or mechanically contacting type, have limitation in coping with performance demands. As a possible solution, magnetic suspension technology was studied. Such a contact-free system has advantages in terms of high accuracy, low production cost and easy adaptability to high precision manufacturing processes. This paper deals with magnetically suspended multi-degrees of freedom actuator which can realize large linear motion. In this paper, the operating principle is explained with the magnetic force analysis, and the equations of motion are derived. Experimental results of the implemented system are also given.

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References

  • Craig, J. J., 1989, Introduction to robotics mechanic and control, Addison-Wesley Publishing Company.

  • Griffiths, D. J., 1989,Introduction to electrodynamics, PRENTICE HALL.

  • Jin, J. and Higuchi, T., 1997, “Direct Electrostatic Levitation and Propulsion,”IEEE Trans. on Industrial Electronics, Vol. 44, No. 2, pp. 234–239.

    Article  Google Scholar 

  • Jung, K. S. and Baek. Y. S., 2001, “Precision Stage Using A Novel Contact-Free Planar Actuator Based on Combination of Electromagnetic forces,”Trans, on KSME A, Vol. 25, No. 11, pp. 1863–1872.

    Google Scholar 

  • Jung, K. S., Lee, S. H. and Baek, Y. S., 2002, “Feasibility Study of General-purpose Precision Stage Using A Novel Contact-Free Surface Actuator Based on Magnetic Suspension Technology, ”Trans. on KSME A, Vol. 26, No. 3, pp. 452–460.

    Article  Google Scholar 

  • Kim, W. J., David, L. T., and Jeffrey, H. L., 1998, “Modeling and Vector Control of Planar Magnetic Levitator,”IEEE Trans. on Industry Applications, Vol. 34, No. 6, pp. 1254–1262.

    Article  Google Scholar 

  • Lie, C. T. and Sheu, N., 1996, “Optimal Pole Arrangement Design of a Linear Switched-Re-luctance Machine for Magnetic Levitation and Propulsion System,”IEEE Trans. on Magnetics, Vol. 32, No. 5, pp. 5067–5069.

    Article  Google Scholar 

  • Michael, A., Soltz, Y., Yao, L. and Jehuda, I. S., 1999, “Investigation of a 2-D Planar Motor Based Machine Tool Motion System,”International Journal of Machine Tools and Manufacture, Vol. 39, Issue 7, pp. 1157–1169.

    Article  Google Scholar 

  • Nasar, S. A., and Unnewehr, L. E., 1983,Electromechanics and Electric Machines, John Wiley & Sons, Inc.

  • Roters, H. C., 1951, Electromagnetic devices, John Wiley & Sons, Inc.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Yonsei University, 120-749, Seoul, Korea

    Sang Heon Lee

  2. School of Mechanical Engineering, Yonsei University, 120-749, Seoul, Korea

    Yoon Su Baek

Authors
  1. Sang Heon Lee
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  2. Yoon Su Baek
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Correspondence to Sang Heon Lee.

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Lee, S.H., Baek, Y.S. Magnetically suspended contact-free linear actuator for precision stage. KSME International Journal 17, 708–717 (2003). https://doi.org/10.1007/BF02983866

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  • DOI: https://doi.org/10.1007/BF02983866

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