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Real-time surface shape measurement by an active interferometer

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Abstract

We have succeeded in video rate analysis of fringes stabilized by an active interferometer placed outside optical benches. The interferometer uses the closed loop control of injection current of a laser diode to compensate for fringe movement that is detected by a spatial filtering detector. A video image of the locked fringes with tilt is supplied to the real-time fringe analyzer that delivers unwrapped phase distribution from the three phase shifted fringes generated by the electronic moiré method. For a concave mirror of 130 mm diameter placed on a wooden desk we observed the repeatability of λ/60 for P-V surface error of λ/5.

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Authors and Affiliations

  1. Graduate School of Science and Engineering, Saitama University, 255, Shimo-Okubo, 338, Urawa, Saitama, Japan

    Ji-Yuan Liu & Ichirou Yamaguchi

  2. Optical Engineering Laboratory, The Institute of Physical and Chemical Research (RIKEN), 2-1,Hirosawa, 351-01, Wako, Saitama, Japan

    Ichirou Yamaguchi, Jun-ichi Kato & Toshinori Nakajima

Authors
  1. Ji-Yuan Liu
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  2. Ichirou Yamaguchi
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  3. Jun-ichi Kato
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  4. Toshinori Nakajima
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Liu, JY., Yamaguchi, I., Kato, Ji. et al. Real-time surface shape measurement by an active interferometer. Optical Review 4, 216–220 (1997). https://doi.org/10.1007/BF02931684

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  • DOI: https://doi.org/10.1007/BF02931684

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