Abstract
The pumping performance of molecular drag pumps (MDP) has been investigated experimentally. The experimented MDPs are a disk-type drag pump (DTDP), helical-type drag pump (HTDP) and compound drag pump (CDP), respectively. In the case of the DTDP, spiral channels of a rotor are cut on both upper surface and lower surface of a rotating disk, and the corresponding stator is a planar disk. In the case of the HTDP, the rotor has six rectangular grooves. The CDP consists with the DTDP, at lower part, and with the HTDP, at upper part. The experiments are performed in the outlet pressure range of 0.2–533 Pa. The inlet pressure and compression ratio are measured under the various conditions of outlet pressure and throughputs, and nitrogen is used for the test gas. At the outlet pressure of 0.2 Pa, the ultimate pressure has been reached to 1.0 × 10−2 Pa for the HTDP, 1.3 × 10−4 Pa for the DTDP, and 3.6 × 10−5 Pa for the CDP. The maximum compression ratio of the CDP is much higher than those of the DTDP or HTDP. Consequently, the ultimate pressure of the CDP is the lowest one.
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References
Chu, J. G., 1987, “A New Hybrid Molecular pump with Large Throughput,”J. Vac. Sci. Technol. A, Vol. 6, No. 3, pp. 1202–1204.
Hablanian, M. H., 1990,High-Vacuum Technology (A Practical Guide), Marcel Dekker, Inc.
Hablanian, M. H., 1994,In Vacuum Science and Technology: Pioneers of 20 th Century, edited by P. A. Redhead (AIP, New York), pp. 126–132.
Heo, J. S. and Hwang, Y. K., 2000, “Molecular Transition and Slip Flows in the Pumping Channels of Drag Pumps,”J. Vac. Sci. Technol. A, Vol. 18, No. 3, pp. 1025–1034.
Heo, J. S. and Hwang, Y. K., 2002, “Direct Simulation of Rarefied Gas Flows in Rotating Spiral Channels,”J. Vac. Sci. Technol. A, Vol. 20, No. 3, pp. 906–910.
Hwang, Y. K. and Heo, J. S., 2001, “Threedimensional Rarefied Flows in Rotating Helical Channels,”J. Vac. Sci. Technol. A, Vol. 19, No. 2, pp. 662–672.
Kwon, M. K. and Hwang, Y. K., 2004, “A Study on the Pumping Performance of the Disktype Drag Pumps for Spiral Channel in Rarefied Gas Flow,”Vacuum, Vol. 76, No. 1, pp. 63–71.
Kwon, M. K., Heo, J. S. and Hwang, Y. K., 2003, “An Experimental Study on the Pumping Performance of the Multi-stage Disk-type Drag Pump,”Journal of the Korean Vacuum Society, Vol. 12, No. 2, pp. 79–85.
Nanbu, K., Kubota, H., Igarashi, S., Urano, C. and Enosawa, H., 1991, “Performance of Spiral Grooves on a Rotor of Turbomolecular Pump,”Trans. JSME, Vol. 57, No. 533, pp. 172–177.
Shi, L., Wang, X. Z., Zhu, Y. and Pang, S. J., 1993, “Design of Disk Molecular Pumps for Hybrid Molecular Pumps,”J. Vac. Sci. Technol. A, Vol. 11, No. 2, pp. 426–431.
Shi, L., Zhu, Y., Wang, X. Z. and Pang, S. J., 1993, “Influence of Clearance on the Pumping Performance of a Molecular Drag Pump,”J. Vac. Sci. Technol. A, Vol. 11, No. 3, pp. 704–710.
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Kwon, MK., Hwang, YK. An experimental study on the pumping performance of molecular drag pumps. J Mech Sci Technol 20, 1483–1491 (2006). https://doi.org/10.1007/BF02915971
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DOI: https://doi.org/10.1007/BF02915971