Abstract
A novel Monte Carlo method of simulating low energy electron (LEE) scattering in polybasic medium is presented. The Mott cross section is adopted to describe the elastic scattering of LEE, and a mean cross section idea is proposed instead of usual determination of the scattering center. The Joy’s modified Bethe equation is used to calculate energy loss of LEE. The scattering processes of LEE in bulk PMMA have been simulated. And the electron backscattering coefficients, the electron interaction range and energy dissipation distribution of LEE in bulk PMMA have been calculated and compared with those calculated by the method of determining scattering center.
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He Yancai, Cao Liqun, Hu Minet al., A calculation method of X-ray quantitative microanalysis of partial specimens with polybasic composition and regular shaps,Science in China Ser. A (in Chinese), 1986(10): 1905.
He Yancai, Chen Jianguang, Wang Xinlei, XQMA determination and calculation method of microregion thickness of multilayer films,Science in China Ser. A (in Chinese), 1990(7): 757.
Stark, T. J., Edenfeld, K. M., Griffis, D. P.et al., Proximity effects in low-energy electron-beam lithogaphy,J. Vac. Sci. Technol., 1993, B11(6): 2367.
Joy, D. C., Luo, S., An empirical stopping power relationship for low energy electron,Scanning, 1989, 11(4): 176.
Tan Zhenyu, He Yancai, Partial wave method for calculating elastic scattering cross section of low-energy electron by solving relativistic Dirac equation,Chinese J. of Computational Physics (inChinese), 1993, 10(2): 239.
Tan Zhenyu, He Yancai, An improved Monte Carlo method of low-energy electron scattering in solids,Chinese Science Bulletin, 1996, 41(9): 783.
Tan Zhenyu, Song Chuanjie, Qiu Peiyong, Matrix equation of spatial travel of scattering electron in solids,J. of Shandong University of Technology (in Chinese), 1992, 22(4): 30.
Fitting, H. T., Transmission, energy distribution, and SE excitation of fast electron in thin films,Phys, Status Solidi A, 1974, 26(2): 525.
Tan Zhenyu, He Yancai, Spatial distribution of backscattered electrons in solids by Monte Carlo simulation,Chinese J. of Computational Physics (in Chinese), 1995, 12(4): 561.
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Tan, Z., He, Y. Monte Carlo calculation method on low energy electron scattering in polybasic medium. Chin. Sci. Bull. 43, 171–174 (1998). https://doi.org/10.1007/BF02883938
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DOI: https://doi.org/10.1007/BF02883938