Abstract
A tensile-plate-on-air-spring model (or called TDK model for short) for micromachined electrostatic ultrasonic transducers has been developed based on a thorough investigation of their dynamic mechanism. The mechanical stiffness effects caused by the compressibility of air gaps, bending stiffness of the diaphragm and in-plane tension applied to the diaphragm, together with an electrostatic negative stiffness effect are included completely in the model. Desired particular fundamental frequency and bandwidth can be obtained by only properly tailoring the geometry, dimensions and materials of transducers according to the model, which provides thereby a reliable theoretical basis for the understanding and optimised design of such transducers.
Similar content being viewed by others
References
Ge, L. F., A theoretical model for electrostatic ultrasonic transducers with micro air-gap structuresChinese Sci. Bull., 1998, 43(9): 728.
Ge. L. F., DK model for electrostatic ultrasonic transducers with V-grooved backplates,J. Acoust. Soc. Am., 1996, 100(4): 2 809.
Carr, H., Wykes, C., Diagnostic measurements in capacitive transducers,Ultrasonics, 1993, 31(1): 13.
Rafig, M., Wykes, C., The performance of capacitive ultrasonic transducers using V-grooved backplates,Meas. Sci. Technol., 1991, 2: 168.
Hietanen, J., Stor-Pellinen, J., Luukala, M., A model for an electrostatic ultrasonic transducer with a grooved backplate,Meas. Sci. Technol., 1992, 3: 1 095.
Mattila, P., Tsuzuki, F., Vaataja, H. et al., Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates,IEEE Trans. UFFC, 1995, 42(11): 1.
Anderson, M. J., Hill, J. A., Fortunko,. M. et al., Broadband electrostatic transducers: Modelling and experiments,J. Acoust. Soc. Am., 1995, 97(1): 262.
Ge, L. F., Modelling of electrostatic ultrasonic transducers with micro air-gap structures, inProc. of The 16th International Congress on Acoustics and 135th ASA Meeting, Seattle, Washington, New York: Acoustical Society of America, 1998, 1081–1082.
Suzuki, K., Higuchi, K., Tanigawa, H., A silicon electrostatic ultrasonic transducer,IEEE Trans. UFFC, 1989, 36(6): 620.
Schindel, D.W., Hutchins, D. A., Zou, L. et al., The design and characterization of micromachined air-coupled capacitance transducers,IEEE Trans. UFFC, 1995, 42(1): 42.
Haller, M. I., Khuri-Yakub, B. T., A surface micromachined electrostatic ultrasonic air transducer,IEEE Trans. UFFC, 1996, 43(1): 1.
Kinsler, L. E., Frey, A. R., Coppens, A. B.et al.,Fundamentals of Acoustics, 3rd ed., New York: John Wiley & Sons, 1982.
Ge, L. F., Impedance characteristics of transducers and reciprocity calibration,J. Acoust. Soc. Am., 1989, 86(1): 210.
Hunt, H. V.,Electroacoustics (2nd printing), New York: The Acoustical Society of America, 1982.
Leissa, A.,Vibration of Plates, Washington D. C.: Natl. Aeron. and Space Admin., 1969.
Bass, H. E., Sutherland, L. C., Piercy, J. et al., Absorption of sound by the atmosphere, inPhysical Acoustics, Vol.17, (ed. Mason, W. P., Thurston, R. N.), New York: Academic Press, 1984.
Author information
Authors and Affiliations
Additional information
Project supported by the National Natural Science Foundation of China (Grant No.69974001).
Rights and permissions
About this article
Cite this article
Ge, L. Dynamic mechanism and its modelling of micromachined electrostatic ultrasonic transducers. Sci. China Ser. A-Math. 42, 1308–1315 (1999). https://doi.org/10.1007/BF02876032
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02876032