Abstract
Thin films of indium-tin oxide have been deposited by DC diode sputtering from an indium-tin alloy target in an argon, hydrogen and oxygen atmosphere. Films with sheet resistance of 11 ohms/square and 80% light transmission have been obtained. The effect of cathode composition and gas mixture on sheet resistance and optical transmission properties of the films have been studied.
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Radhakrishna, M.C., Rao, M.R. Some properties of indium-tin oxide films. Pramana - J Phys 9, 1–6 (1977). https://doi.org/10.1007/BF02845926
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DOI: https://doi.org/10.1007/BF02845926