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A microprocessor based autoscanner for electromigration studies in thin films

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Abstract

Mass transport due to electromigration can be estimated if the diffusion coefficientD and the electromigration effective charge numberZ* are known. Neutron activated tracer scanning method determine the radioactivity at different positions. An automatic scanning system for determining the radioactive concentration profiles developed using a microprocessor is described in this paper. Using the radioactive concentration profiles the electromigration shift is determined. From this shift the electromigration effective charge numberZ* is calculated. The system developed was tested for tin thin films.

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Dhanabalan, M., Syamasundara Rao, Y. & Reddy, K.V. A microprocessor based autoscanner for electromigration studies in thin films. Pramana - J Phys 33, 541–546 (1989). https://doi.org/10.1007/BF02845804

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  • DOI: https://doi.org/10.1007/BF02845804

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