Abstract
A calibration test was done in order to measure its sensitivity coefficient by an improved soil test derice. The experimental result shows that the soil pressure min-sensor made of the monocrystalline silicon (SPM-MS) is proved to be good linear, high precision and less discrete that can fetch precise data in low pressure range even near by O point, which guarantees the reliability of the soil pressure test in geotechnical engineering.
Similar content being viewed by others
References
Prudenziati M.Thick Film Sensor Handbook of Sensor and Acatuators' S. The Netherlands: Elsevier, 1994:189–208
Ju Chuanwen, Yang Xiuzhen, Wang Chaoyong. Application of Bellows Pressure Sensor.Journal of Transducer Technology, 2002, 21(8):50–52
Wang Yunzhang. The Study on the Adhesive Sealing Technology for Strain Transducers.J. Process Automation Instrumentation, 1999, 20(10):36–40
Yin Fuyan. Thin-film Gauge and Sensor.J Sensor World. 1997, 6:30–36
Mu Wenzhai, Zhao Yiquan. Sensor of Strain-Resistor and ITS Application in High-Strain Dynamic Testing of Piles.J. Earthquake Research in Plateau, 1997, 9(2):43–48
Edited by Ma Liangcheng, Feng Renxian, Xu Debing.Strain Detection and Transducer Technology. Beijing: China Measure Press, 1993, 11:439–444
Shen Guifen. Analyses of Sensitivity Characteristic for Piezoresistive Sensor.Journal of transducer Technology, 1999, 18 (4):17–20
K Arshak, R Perrem. Fabrication of Thin Film Strain Gange Transducer using Bi2O3−V2O5.J. Sensor and Actuators, 1993, A36:73–76
Stecher G, Spitzenberger K; Muller K. Pressure Sensor. P.US: 4382247, 1983-05-23
Wang Hongye.The Transducer Technology. Hunan: Hunan Press of Science and Technology, 1985, 7:204–206
Huang Yunfei.The Utility Technology of Deep Foundation Ditch. Beijing: Weapon Industry Press, 1996, 11:490–492
Author information
Authors and Affiliations
Corresponding author
Additional information
Funded by the Natural Science Foundation of Hubei Province (No. 2004ABA073) and the Education Bureau Foundation of Hubei Province (No. 2003A001)
Rights and permissions
About this article
Cite this article
Xiao, Y., Xiaoke, S. Soil pressure mini-sensor made of monocrystalline silicon and the measurement of its sensitivity coefficient. J. Wuhan Univ. Technol.-Mat. Sci. Edit. 20, 135–137 (2005). https://doi.org/10.1007/BF02841306
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF02841306