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Preparation of PZT thin films by magnetron sputtering with metal and metal oxide composite target

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Wuhan University Journal of Natural Sciences

Abstract

This article mainly deals with the preparation and properties of PZT thin films. A new type of Metal-Metal Oxide composite target was developed. Relating factors have been discussed. The electrical and optical properties of PZT thin films have also been studied.

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Authors and Affiliations

  1. Department of Physics, Wuhan University, 430072, Wuhan, China

    Zhou Zhengguo, Tang Xianmin, Li Jiangpeng & Zhang Yu

Authors
  1. Zhou Zhengguo
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  2. Tang Xianmin
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  3. Li Jiangpeng
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  4. Zhang Yu
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Additional information

Zhou Zhenguo: born in Feb. 1939, Associate professor. Current research interest is in thin film material

Supported by the National Natural Science Foundation of China

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Zhengguo, Z., Xianmin, T., Jiangpeng, L. et al. Preparation of PZT thin films by magnetron sputtering with metal and metal oxide composite target. Wuhan Univ. J. of Nat. Sci. 1, 49–52 (1996). https://doi.org/10.1007/BF02827579

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  • DOI: https://doi.org/10.1007/BF02827579

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