Abstract
Phase modulated ellipsometric data recorded during molecular beam epitaxial growth of CdTe/HgTe and CdTe/ZnTe superlattices on (100) and (211)B oriented Cd0.96Zn0.04Te and GaAs substrates are presented. The measurements provide a continuous monitor of the growth process, thickness, growth rate, compositional data, and evidence of interdiffusion in CdTe/HgTe superlattices at elevated temperatures. The thickness measurements are independent of growth kinetics and surface orientation and agree well with those obtained from x-ray diffraction and reflection high energy electron diffraction. Ellipsometry shows that the incorporation of Hg in CdTe is significantly higher on (100) oriented surfaces than on (211)B oriented surfaces. Fine structure in the data from CdTe/ZnTe superlattices may be associated with a surface reconstruction during deposition of each CdTe layer. The experimental results for CdTe/HgTe superlattices compare well with results of thin film multi-layer calculations. The general applicability of ellipsometry as an in-situ analytical technique for epitaxial growth of a range of semiconductor superlattices is discussed.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J.N. Schulman and T.C. McGill,Appl. Phys. Lett. 34, 663 (1979).
D.L. Smith, T.C. McGill and J.N. Schulman,Appl. Phys. Lett. 43, 180 (1983).
J.M. Arias, S.H. Shin, D.E. Cooper, M. Zandian, J.G. Pasko, E.R. Gertner, R.E. DeWames and J. Singh,J. Vac. Sci. Technol. A8, 1025 (1990).
I. Sugiyama, A. Hobbs, T. Saito, O. Ueda, K. Shinohara and H. Takigawa,J. Cryst. Growth 117, 161 (1992).
E.R. Youngdale, C.A. Hoffman, J.R. Meyer, F.J. Bartoli, X. Chu, J.P. Faurie, J.W. Han, J.W. Cook and J.F. Schetzina,J. Vac. Sci. Technol. A7, 365 (1989).
R.H. Hartley, M.A. Folkard, D. Carr, P.J. Orders, D. Rees, I.K. Varga, V. Kumar, G. Shen, T.A. Steele, H. Buskes and J.B. Lee,J. Cryst. Growth 117, 166 (1992).
R.H. Hartley, M.A. Folkard, D. Carr, P.J. Orders, D. Rees, I.K. Varga, V. Kumar, G. Shen, T.A. Steele, H. Buskes and J.B. Lee,J. Vac. Sci. Technol. B10, 1410 (1992).
F. Abeles,Progress in Optics, Vol. II, E. Wolf, ed., (North Holland, Amsterdam, 1963).
J. Reno, R. Sporken, Y.J. Kim, C. Hsu and J.P. Faurie,Appl. Phys. Lett. 51, 1545 (1987).
C.A. Hoffman, J.R. Meyer, E.R. Youngdale, J.R. Lindle, F.J. Bartoli, J.W. Han, K.A. Harris, J.W. Cook and J.F. Schetzina,J. Vac. Sci. Technol. A6, 2785 (1988).
O.K. Wu, F.A. Shirland, J.P. Baukus, J.N. Schulman, G.S. Kamath and F.A. Patten,J. Cryst. Growth. 95, 594 (1989).
R.H. Miles, G.Y. Wu, M.B. Johnson, T.C. McGill, J.P. Faurie and S. Sivananthan,Appl. Phys. Lett. 48, 1383 (1986).
D.E. Aspnes and A.A. Studna,Phys. Rev. B 27, 985 (1983).
L. Vina, C. Umbach, M. Cardona and L. Vodopyanov,Phys. Rev. B 29, 6752 (1984).
D.E. Aspnes, S.M. Kelso, R.A. Logan and R. Bhat,J. Appl. Phys. 60, 754 (1986).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Folkard, M.A., Shen, G., Kumar, V. et al. In-situ ellipsometric measurements of the MBE growth of CdTe/HgTe and CdTe/ZnTe superlattices. J. Electron. Mater. 22, 1097–1102 (1993). https://doi.org/10.1007/BF02817531
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF02817531