Abstract
The standard infrared photovoltaic technology developed for HgCdTe by LETI and industrialized by SOFRADIR is based on the very simple approach of planar ion-implanted n-on-p homojunctions. Both the growth by liquid-phase epitaxy of excellent-quality epitaxial layers and the simplicity of the planar ion-implanted process enables state-of-the-art detectors to be achieved with a high technological yield. These detectors present high shunt impedance, good quantum efficiency, and a low l/f noise level. The diodes are diffusion-limited down to temperatures much lower than 77K. Their saturation current is limited by the minority-carrier lifetime in the p-side material. R0A values around 30 ohm-cm2 are routinely obtained for 10.0 μm cutoff wavelength detectors at 77K. In this paper, we show that with a new process we can increase the diode R0A by more than one order of magnitude. This effect is obtained as a result of an increase of minority-carrier lifetime in the n-on-p homojunction configuration. The maximum R0A value obtained was 655 ohm-cm2 on a 10.0 μm cutoff wavelength detector at 77K. Furthermore, other figures of merit much as quantum efficiency or shunt impedance are slightly improved, and l/f noise is not affected. The data presented in the 40–200K temperature range and 9–13 μm cutoff wavelength range show that this decrease of dark current is kept throughout these temperature wavelength ranges. Therefore, we show that a simple planar ion-implanted homojunction can lead to very large R0A, close to theoretical limits and comparable to data published for p-on-n heterojunctions.
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References
G. Destefanis,Semicond. Sci. Technol. 6, C88, C92 (1991).
G. Destefanis,J. Cryst. Growth 86, 700 (1988).
B. Pelliciari,J. Cryst. Growth 86, 146 (1988).
D. Amingual, J.P. Chamonal, J. Cluzel and G. Destefanis, at SPIE Conference, San Diego, July 1992.Infrared Detectors State of the Art, to be published in SPIE Proceedings.
P.R. NortonOpt. Eng. 30, 1649 (1991).
C.C. Wang,J. Vac. Sci. Technol. B9, 1740 (1991).
G.N. Pultz, P.W. Norton, E.E. Krueger and B. Reine,J. Vac. Sci. Technol. B9, 1724 (1991).
A. Rogalski and W. Larkowski,Electron Techn. 18, 55 (1985).
A. Rogalski,Infrared Phys. 28, 139 (1988).
A. Rogalski, A. Jozwikowska K. Jozwikowski and J. Rutkowski,Infrared Phys. 33, 463 (1992).
L.O. Bubulac,J. Cryst. Growth 86, 723 (1988).
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Destefanis, G., Chamonal, J.P. Large improvement in HgCdTe photovoltaic detector performances at LETI. J. Electron. Mater. 22, 1027–1032 (1993). https://doi.org/10.1007/BF02817520
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DOI: https://doi.org/10.1007/BF02817520