Modeling of in situ monitored laser reflectance during MOCVD growth of HgCdTe

Abstract

An effective way to in situ monitor the metalorganic chemical vapor deposition (MOCVD) of HgCdTe/CdTe/ZnTe on GaAs or GaAs/Si substrates is presented. Specular He-Ne laser reflectance was used to in situ monitor the growth rates, layer thickness, and morphology for each layer in the grown multilayer structure. In situ monitoring has enabled precise measurements of ZnTe nucleation and CdTe buffer layer thicknesses. Monitoring the constancy of reflectance during the thicker CdTe buffer growth where absorption in the CdTe reduces reflectance to just the surface component has led to optimum buffer growth ensuring good quality of subsequently grown HgCdTe. During the interdiffused multilayer process (IMP) HgCdTe growth, because multiple interfaces are present within the absorption length, a periodic reflectance signal is maintained throughout this growth cycle. A theoretical model was developed to extract IMP layer thicknesses from in situ recorded experimental data. For structures that required the growth of a larger band gap HgCdTe cap layer on top of a smaller band gap active layer, in situ monitored reflectance data allowed determination of alloy composition in the cap layer as well. Continuous monitoring of IMP parameters established the stability of growth conditions, translating into depth uniformity of the grown material, and allowed diagnosis of growth rate instabilities in terms of changes in the HgTe and CdTe parts of the IMP cycle. A unique advantage of in situ laser monitoring is the opportunity to perform “interactive” crystal growth, a development that is a key to real time MOCVD HgCdTe feedback growth control.