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Use of ellipsometry to characterize the surface of HgCdTe

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Abstract

Ellipsometry is a sensitive, rapid, and nondestructive optical technique for characterizing materials, especially surfaces and films. By measuring the change in the state of polarization of a light beam reflecting from the sample, one may infer certain characteristics of the sample. We present a review of the applications of ellipsometry to HgCdTe and related materials. The fundamentals of the technique are discussed briefly and the optical parameters at the wavelength 6328A for several materials of interest to infrared technology are listed. The emphasis of this paper is on the interpretation of the ellipsometric data, expressed in terms of the usual parameters Ψ and Δ obtained at a single wavelength. Methods and limitations of the analysis of single films, both nonabsorbing and absorbing, are discussed. Examples of an acceptance window for process monitoring are presented. The ellipsometric signatures of amorphous Te films and microroughness are described, along with a graphical method for interpreting the readings from very thin films. Spectroscopic applications and in situ monitoring of molecular beam epitaxial growth processes are briefly reviewed.

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References

  1. R.M.A. Azzam and N.M. Bashara,Ellipsometry and Polarized Light, North-Holland, Amsterdam (1977).

    Google Scholar 

  2. R.F. Spanier,Industrial Research 17, (9) 73 (1975).

    Google Scholar 

  3. R.J. Kutko,Solid State Technol. 21, (2), 43 (1978).

    CAS  Google Scholar 

  4. E.D. Palik, ed.,Handbook of Optical Constants of Solids, Academic Press, Orlando (1985).

    Google Scholar 

  5. E.D. Palik, ed.,Handbook of Optical Constants of Solids II, Academic Press, Orlando (1991).

    Google Scholar 

  6. D.E. Aspnes,Optical Properties: New Developments, ed. B.O. Seraphin, North-Holland, Amsterdam (1976).

    Google Scholar 

  7. D.E. Aspnes, in Ref. 4.

    Google Scholar 

  8. D.E. Aspnes,Surf. Sci. 101, 84 (1980).

    Article  CAS  Google Scholar 

  9. R.W. Collins,Rev. Sci. Instr. 61, 2029 (1990).

    Article  CAS  Google Scholar 

  10. P.S. Hauge, R.H. Muller and C.G. Smith,Surf. Sci. 96, 81 (1980).

    Article  CAS  Google Scholar 

  11. R.T. Holm, in Ref. 5.

    Google Scholar 

  12. D.R. Rhiger and R.E. Kvaas, Final Report AFWAL-TR-86-4009, Contract F33615-80-C-5084 (1986).

  13. P.M. Amirtharaj, in Ref. 5. Numerical table obtained from H. Arwin and D.E. Aspnes,J. Vac. Sci. Technol. A 2, 1316 (1984).

    Google Scholar 

  14. P.M. Amirtharaj, in Ref. 5. Numerical table obtained from L. Viña, C. Umbach, M. Cardona and L. Vodopyanov.Phys. Rev. B 29, 6752 (1984).

    Google Scholar 

  15. T.E. Korsak, N.P. Syosoeva, B.M. Ayupov, V.V. Antonov, A.V. Voltsekhovskii and E.F. Tivota,Sov. Phys. Semicond. 19, 222 (1985).

    Google Scholar 

  16. H.H. Li,J. Phys. Chem. Ref. Data 13, 103 (1984).

    Article  CAS  Google Scholar 

  17. J. Bajaj, S.J.C. Irvine, H.O. Sankur and S.A. Svoronos, these proceedings.

  18. D.E. Aspnes, S.M. Kelso, R.A. Logan and R. Bhat,J. Appl. Phys. 60, 754 (1986).

    Article  CAS  Google Scholar 

  19. B.A. Baumgratz, M.S. Thesis, University of California at Santa Barbara (1988).

  20. D.F. Edwards, in Ref. 4

    Google Scholar 

  21. H. Keller and J. Stuke,Phys. Status Solidi 8, 831 (1965).

    Article  CAS  Google Scholar 

  22. J. Stuke,J. Non-Cryst. Solids 4, 1 (1970).

    Article  CAS  Google Scholar 

  23. N. Uchida,Phys. Rev. B 4, 3736 (1971).

    Article  Google Scholar 

  24. S. Singh, W.A. Bonner and L.G. van Uitert,Phys. Lett. 38A, 407 (1972).

    Google Scholar 

  25. D.W. Lynch and W.R. Hunter, in Ref. 4.

    Google Scholar 

  26. D.W. Lynch and W.R. Hunter, in Ref. 5.

    Google Scholar 

  27. R.Y. Koyama, N.V. Smith and W.E. Spicer,Phys. Rev. B 8, 2426 (1973).

    Article  CAS  Google Scholar 

  28. A. Borghesi and A. Piaggi, in Ref. 5.

    Google Scholar 

  29. D.K. Burge and H.E. Bennett,J. Opt. Soc. Amer. 54, 1428 (1964).

    Google Scholar 

  30. W.V. McLevige, J.M. Arias, D.D. Edwall and S.L. Johnston,J. Vac. Sci. Technol. B 9, 2483 (1991).

    Article  CAS  Google Scholar 

  31. J.M. Arias, M. Zandian, S.H. Shin, W.V. McLevige, J.G. Pasko and R.E. DeWames,J. Vac. Sci. Technol. B 9, 1646 (1991).

    Article  CAS  Google Scholar 

  32. H. Arwin, D.E. Aspnes and D.R. Rhiger,J. Appl. Phys. 54, 7132 (1983).

    Article  CAS  Google Scholar 

  33. H. Arwin and D.E. Aspnes,J. Vac. Sci. Technol. A 2, 1316 (1984).

    Article  CAS  Google Scholar 

  34. C.M. Stahle, C.R. Helms, H.E. Schaake, R.L. Strong, A. Simmons, J.B. Pallix and C.H. Becker,J. Vac. Sci. Technol. A 7, 474 (1989). See also the erratum inJ. Vac. Sci. Technol. A 8, 3373 (1990).

    Article  CAS  Google Scholar 

  35. R.J. Archer,J. Opt. Soc. Amer. 52, 970 (1962).

    Article  CAS  Google Scholar 

  36. N.V. Smith, Y. Komiya and R.H. Weissman,Solid-State Electron. 12, 765 (1969).

    Article  Google Scholar 

  37. N.T. McDevitt and W.L. Baum, USAF report no. AFWAL-TR-83-4034 (NTIS:ADA131844), (1983).

  38. J.F. Marchiando,A Software Program for Aiding the Analysis of Ellipsometric Measurements, Simple Models, National Institute of Standards and Technology, Special Publication No. 400-83 (1989).

  39. F.L. McCarckin, E. Passaglia, R.R. Stromberg and H.L. Steinberg,J. Res. Nat. Bur. Standards 67A, 363 (1963).

    Google Scholar 

  40. Rudolph Research, P.O. Box 1000, Flanders, NJ 07836.

  41. Gaertner Scientific Corp., 1201 Wrightwood Ave., Chicago, IL 60614.

  42. D. Chandler-Horowitz and G.A. Candela,J. Physique 44 (Colloque C10), Page C10–23 (1983).

    Google Scholar 

  43. J.H. Ho, C.L. Lee, C.W. Jen and T.F. Lei,Solid-State Electron. 30, 973 (1987).

    Article  CAS  Google Scholar 

  44. J.H. Ho, C.L. Lee and T.F. Lei,Solid-State Electron. 31, 1321 (1988).

    Article  Google Scholar 

  45. D.R. Rhiger and J.D. Parsons (unpublished).

  46. M. Delfino and R.R. Razouk,J. Electrochem. Soc. 129, 606 (1982).

    Article  CAS  Google Scholar 

  47. K. Watanabe, T. Motooka, N. Hashimoto and T. Tokuyama,Appl. Phys. Lett. 36, 451 (1980).

    Article  CAS  Google Scholar 

  48. T. Motooka and K. Watanabe,J. Appl. Phys. 51, 4125 (1980).

    Article  CAS  Google Scholar 

  49. T. Lohner, G. Mezey, E. Kotai, F. Paszti, A. Manuaba and J. Gyulai,Nucl. Instr. Meth. Phys. Rev. 209–210, 615 (1983).

    Article  Google Scholar 

  50. E.A. Irene and D.W. Dong,J. Electrochem. Soc. 129, 1347 (1982).

    Article  CAS  Google Scholar 

  51. J. Ashok, P.L.H. Varaprasad and J.R. Birch, in Ref. 5.

    Google Scholar 

  52. J.A. Wilson, V.A. Cotton, J. Silberman, D. Laser, W.E. Spicer and P. Morgen,J. Vac. Sci. Technol. A 1, 1719 (1983).

    Article  CAS  Google Scholar 

  53. B. Twu,J. Electrochem. Soc. 126, 1589 (1979).

    Article  CAS  Google Scholar 

  54. J. Poksheva, Y. Juravel, A. Wong, A. Childs, S. West and T. Heim, Final Report WL-TR-91-8054, Contract F33615-87-C-5218.

  55. D.E. Aspnes, J.B. Theeten and F. Hottier,Phys. Rev. B 8, 3292 (1979).

    Article  Google Scholar 

  56. R.L. Strong and P.B. Smith,J. Vac. Sci. Technol. A 8, 1544 (1990).

    Article  CAS  Google Scholar 

  57. D.E. Aspnes and H. Arwin,J. Vac. Sci Technol. A 2, 1309 (1984).

    Article  CAS  Google Scholar 

  58. R. N. Zitter,Surf. Sci. 28, 335 (1971).

    Article  CAS  Google Scholar 

  59. J.-P. Häring, J.G. Werthen, R.H. Bube, L. Gulbrandsen, W. Jansen and P. Luscher,J. Vac. Sci. Technol. A 1, 1469 (1983).

    Article  Google Scholar 

  60. J.P. Ponpon,Solid-State Electron. 28, 689 (1985).

    Article  CAS  Google Scholar 

  61. U. Solzbach and H.J. Richter,Surf. Sci. 97, 191 (1980).

    Article  CAS  Google Scholar 

  62. D.R. Rhiger and R.E. Kvaas,J. Vac. Sci. Technol. 21, 168 (1982).

    Article  CAS  Google Scholar 

  63. J.M. Peterson and D.R. Rhiger (unpublished).

  64. R. Tenne, R. Brener and R. Triboulet,J. Vac. Sci. Technol. A 7, 2570 (1989).

    Article  CAS  Google Scholar 

  65. D.E. Aspnes and H. Arwin,J. Vac. Sci. Technol. A 2, 600 (1984).

    Article  Google Scholar 

  66. L. Viña, C. Umbach, M. Cardona and L. Vodopyanov,Phys. Rev. B 29, 6752 (1984).

    Article  Google Scholar 

  67. P.M. Raccah, J.W. Garland, Z. Zhang, U. Lee, D.Z. Xue, L.L. Abels, S. Ugur and W. Wilinsky,Phys. Rev. Lett. 53, 1958 (1984).

    Article  CAS  Google Scholar 

  68. D.E. Aspnes and A.A. Studna,SPIE Proc. 276, 227 (1981).

    CAS  Google Scholar 

  69. K. Vedam, S.Y. Kim, L. D'Aries and A.H. Guenther,Optics Lett. 12, 456 (1987).

    CAS  Google Scholar 

  70. J.L. Freeouf,Appl. Phys. Lett. 53, 2426 (1988).

    Article  CAS  Google Scholar 

  71. S. Logothetidis,J. Appl. Phys. 65, 2416 (1989).

    Article  CAS  Google Scholar 

  72. Y. Demay, J.P. Gailliard and P. Medina,J. Cryst. Growth 81, 97 (1987).

    Article  CAS  Google Scholar 

  73. Y. Demay, D. Arnoult, J.P. Gailliard and P. Medina,J. Vac. Sci. Technol. A 5, 3139 (1987).

    Article  CAS  Google Scholar 

  74. A.V. Rzhanov, K.K. Svitashev, A.S. Mardezhov and V.A. Shvets,Sov. Phys. Dokl. 32, 930 (1987).

    Google Scholar 

  75. R.H. Hartley, M.A. Folkard, D. Carr, P.J. Orders, D. Rees, I.K. Varga, V. Kumar, G. Shen, T.A. Steele, H. Buskes and J.B. Lee,J. Cryst. Growth 117 166 (1992).

    Article  CAS  Google Scholar 

  76. R.H. Hartley, M.A. Folkard, D. Carr, P.J. Orders, D. Rees, I.K. Varga, V. Kumar, G. Shen, T.A. Steele, H. Buskes and J.B. Lee,J. Vac. Sci. Technol. B 10, 1410 (1992).

    Article  CAS  Google Scholar 

  77. M.A. Folkard, G. Shen, V. Kumar, T.A. Steele D. Rees, I.K. Varga, D. Carr, K. Fueloep, B.A. Johnson, P.J. Orders, R.H. Hartley, H. Buskes and M. Gal, these proceedings.

  78. B.W. Abshere, A.R. Davis, K.A. Kormos, R.E. Kvaas, D.R. Rhiger, R.P. Ruth, K.D. Treese and R.E. Welt, Final Report AFWAL-TR-85-4147, Contract F33615-84-C-5083.

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    David R. Rhiger

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Rhiger, D.R. Use of ellipsometry to characterize the surface of HgCdTe. J. Electron. Mater. 22, 887–898 (1993). https://doi.org/10.1007/BF02817502

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