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CdTe and HgTe surface growth kinetics for molecular and metalorganic molecular beam epitaxy

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Abstract

The surface growth kinetics of CdTe and HgTe have been investigated during molecular and metalorganic molecular beam epitaxy. The surface growth kinetics was studied through in-situ measurements of the growth rate as a function of flux ratio and substrate temperature on the (001), (111)B, and (211)B CdTe surface orientations. For the (001) and (111)B CdTe growth kinetics, the existence of low binding energy surface precursor sites was proposed for both molecular and atomic growth species before lattice incorporation. Intensity oscillations were observed during HgTe growth on misoriented (111)B surfaces and during CdTe growth on the (211)B orientation. The (211)B surface reconstructions displayed both vicinal and singular surface characteristics, depending on the growth flux ratio.

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References

  1. B.K. Wagner, D. Rajavel, RG. Benz, II and C.J. Summers,J. Vac. Sci. Technol. B 9, 1656 (1991).

    Article  CAS  Google Scholar 

  2. D. Rajavel and C.J. Summers,Appl. Phys. Lett. 60, 2231 (1992).

    Article  CAS  Google Scholar 

  3. R.G. Benz II, B.K. Wagner and C.J. Summers,J. Vac. Sci. Technol. A8, 1020 (1990).

    Article  CAS  Google Scholar 

  4. R.G. Benz II, B.K. Wagner, D. Rajavel and C.J. Summers,J. Cryst. Growth 111, 725 (1991).

    Article  CAS  Google Scholar 

  5. B.K. Wagner, RG. Benz and C.J. Summers,J. Vac. Sci. Technol. A7, 295 (1989).

    Article  CAS  Google Scholar 

  6. R.G. Benz, II, “Surface Growth Kinetics in Molecular Beam Epitaxy and Gas Source Molecular Beam Epitaxy of CdTe,” Ph.D. Dissertation, Georgia Institute of Technology, 1992.

  7. D. Rajavel, F. Mueller, J.D. Benson, B.K. Wagner, R.G. Benz II and C.J. Summers,J. Vac. Sci. Technol. A8, 1002 (1990).

    Article  CAS  Google Scholar 

  8. J.S. Resh, K.D. Jamison, J. Strozier and A. Ignatiev,Rev. Sci. Instrum. 61, 771 (1990).

    Article  Google Scholar 

  9. J.D. Benson, B.K. Wagner, A. Torabi and C.J. Summers,Appl. Phys. Lett. 49, 1034 (1986).

    Article  CAS  Google Scholar 

  10. J.M. Arias and G. Sullivan,J. Vac. Sci. Technol. A5, 3143 (1987).

    Article  CAS  Google Scholar 

  11. B.A. Joyce, J. Zhang, T. Shitara, J.H. Neave, A. Taylor, S. Armstrong, M.E. Pemble and C.T. Foxon,J. Cryst. Growth 115, 338 (1991).

    Article  CAS  Google Scholar 

  12. A. Million, L. DiCioccio, J.P. Gailliard and J. Piaguet,J. Vac. Sci. Technol. A6, 2813 (1988).

    Article  CAS  Google Scholar 

  13. RJ. Koestner and H.F. Schaake,J. Vac. Sci. Technol. A6, 2834 (1988).

    Article  CAS  Google Scholar 

  14. L. Ulmer, H. Mariette, N. Nagnea and P. Gentile,J. Cryst. Growth 111, 711 (1991).

    Article  CAS  Google Scholar 

  15. C.T. Foxon and B.A. Joyce,Surf Sci. 64, 293 (1977).

    Article  CAS  Google Scholar 

  16. H.J. Kreuzer and Z.W. Gortel,Physisorption Kinetics, Berlin: Springer Verlag (1986).

    Google Scholar 

  17. J.D. Benson, D. Rajavel, B.K. Wagner, R Benz II and C.J. Summers,J. Cryst. Growth 95, 543 (1989).

    Article  CAS  Google Scholar 

  18. S. Sivananthan, X. Chu, J. Reno and J.P. Faurie,J. Appl. Phys. 60, 1359 (1986).

    Article  CAS  Google Scholar 

  19. T.H. Myers, R.W. Yanka, K.A. Harris, A.R. Reisinger, J. Han, S. Hwang, Z. Yang, N.C. Giles, J.W. Cook, Jr., J.F. Schetzina, R.W. Green and S. McDevitt,J. Vac. Sci. Technol. A7, 300 (1989).

    Article  CAS  Google Scholar 

  20. R. People, J.C. Bean, C.G. Bethea, S.K Sputz and L.J. Peticolas,Appl. Phys. Lett. 61, 1122 (1992).

    Article  CAS  Google Scholar 

  21. S.R Kurtz, A. Katz, RM. Biefeld, R.L. Gunshor and R.J. Malik,MRS Symp. Proc. 216, 163 (1991).

    CAS  Google Scholar 

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Benz, R.G., Wagner, B.K., Conte, A. et al. CdTe and HgTe surface growth kinetics for molecular and metalorganic molecular beam epitaxy. J. Electron. Mater. 22, 815–820 (1993). https://doi.org/10.1007/BF02817491

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  • DOI: https://doi.org/10.1007/BF02817491

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