Skip to main content
SpringerLink
Log in

Nuclear microanalysis of aluminium impurities in silicon

  • Published:
Lettere al Nuovo Cimento (1971-1985)

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. G. Majni andG. Ottaviani:Appl. Phys. Lett.,31, 125 (1977).

    Article  ADS  Google Scholar 

  2. G. Majni andG. Ottaviani:J. Cryst. Growth,45, 132 (1978).

    Article  ADS  Google Scholar 

  3. G. Majni, G. Ottaviani andR. Stuck:Thin Solid Films,55, 235 (1978).

    Article  ADS  Google Scholar 

  4. G. Majni andG. Ottaviani:J. Cryst. Growth,46, 119 (1979).

    Article  ADS  Google Scholar 

  5. I. V. Mitchell andW. W. Lennard: inIon Beam Surface Layer Analysis, edited byO. Meyer, G. Linker andF. KÄppeler, Vol.2 (New York, N. Y., 1976).

  6. E. Gadioli, I. Iori, M. Mangialaio andG. Pappalardo:Nuovo Cimento,38, 1105 (1965).

    Article  Google Scholar 

  7. C. F. Williamson, J. P. Boujot andJ. Picard: Report CEA-R 3042 (1966).

Download references

Author information

Authors and Affiliations

  1. Unità Gruppo Nazionale di Struttura della Materia del C.N.R., Padova Istituto di Fisica dell’Università, Via Marzolo 8, 35100, Padova, Italia

    G. Battaglin & G. Della Mea

Authors
  1. G. Battaglin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. G. Della Mea
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Work supported by GNSM-CNR and performed at the Laboratori Nazionali INFN di Legnaro (Padova).

Rights and permissions

Reprints and permissions

About this article

Cite this article

Battaglin, G., Mea, G.D. Nuclear microanalysis of aluminium impurities in silicon. Lett. Nuovo Cimento 27, 397–400 (1980). https://doi.org/10.1007/BF02817204

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02817204

Search

Navigation