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Lattice location of boron implanted silicon after laser annealing

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Lettere al Nuovo Cimento (1971-1985)

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Authors and Affiliations

  1. Istituto di Struttura della Materia, 95129, Catania

    G. Foti

  2. Gruppo Nazionale di Struttura della Materia del CNR, 95129, Catania

    G. Foti

  3. Istituto di Fisica dell’Università, 35100, Padova

    G. della Mea

  4. Gruppo Nazionale di Struttura della Materia del CNR, 35100, Padova

    G. della Mea

Authors
  1. G. Foti
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  2. G. della Mea
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Work performed at the Laboratori Nazionali di Legnaro (Padova) and Istituto ai Fisica, Ingegneria di Roma.

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Foti, G., Mea, G.d. Lattice location of boron implanted silicon after laser annealing. Lett. Nuovo Cimento 21, 89–93 (1978). https://doi.org/10.1007/BF02762794

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