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Bulletin of Materials Science

, Volume 16, Issue 6, pp 665–678 | Cite as

Better ceramic substrates through zeolites

  • M A Subramanian
  • D R Corbin
  • U Chowdhry
Article

Abstract

A novel synthetic route for fabricating dense aluminosilicate-based ceramics at relatively low temperatures (⩽1000°C) is described. The method involves ion exchange of an appropriate zeolite powder, followed by fabrication and sintering, to form a dense ceramic. Anorthite, cordierite- andβ-spodumene-based ceramic substrates with attractive physical properties for microelectronic packaging are obtained using these unusual precursors. A brief overview on the property requirements for substrates used in microelectronic packaging is outlined at the beginning of the article.

Keywords

Zeolites precursors ceramics microelectronic packaging anorthite cordierite 

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Copyright information

© Indian Academy of Sciences 1993

Authors and Affiliations

  • M A Subramanian
    • 1
  • D R Corbin
    • 1
  • U Chowdhry
    • 1
  1. 1.E. I. duPont de Nemours and CompanyCentral Research and Development, Experimental StationWilmington, DelawareUSA

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