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Analysis of inhomogeneities on wafers by the integral transform method

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Authors and Affiliations

  1. Moscow State University, Moscow, Russia

    Yu. A. Eremin & V. I. Ivakhnenko

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  1. Yu. A. Eremin
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  2. V. I. Ivakhnenko
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Eremin, Y.A., Ivakhnenko, V.I. Analysis of inhomogeneities on wafers by the integral transform method. Diff Equat 36, 1370–1380 (2000). https://doi.org/10.1007/BF02754310

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