Abstract
Advanced technology and future prospect of oxide-based electronic materials are described with a focus on the significance of atomically controlled epitaxy of high-T c superconductors and related oxide films. Problems in suitably forming the oxides whose power is potentially superior to silicon’s are discussed to stimulate technology development for engineering oxide film growth on an atomic scale. Our experimental results on controlled epitaxial growth of oxide films are presented with respect to pulsed laser deposition of YBa2Cu3O7 −δ films as well as laser MBE growth of SrTiO3 homoepitaxy and CeO2 heteroepitaxy on Si substrates.
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Koinuma, H. Crystal engineering of high-T c and related oxide films for future electronics. Bull. Mater. Sci. 18, 435–445 (1995). https://doi.org/10.1007/BF02749772
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DOI: https://doi.org/10.1007/BF02749772