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Electrical and optical properties of µc-SiH films

  • Proceedings Of The Symposium On Thin Film Science And Technology
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Abstract

Microcrystalline silicon films have been found quite useful in amorphous silicon solar cells as a contact material in n-i-p cells. Microcrystalline silicon films are obtained when amorphous silicon films are prepared by R.F. glow discharge of SiH4 + H2 at higher power ratings. These films possess higher conductivity as well as high transmission than amorphous silicon films. The present paper reports the preparation technique ofµc-SiH films using R.F. capacitive glow discharge of hydrogen-diluted silane. X-ray studies andtem studies of the films indicate microcrystallinity of the films. The electrical and optical properties are also reported.

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Authors and Affiliations

  1. Solid State Physics Laboratory, Lucknow Road, 110 007, Delhi, India

    G C Dubey, R A Singh, S N Mukherjee, Surendra Pal & M G Rao

Authors
  1. G C Dubey
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  2. R A Singh
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  3. S N Mukherjee
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  4. Surendra Pal
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  5. M G Rao
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Dubey, G.C., Singh, R.A., Mukherjee, S.N. et al. Electrical and optical properties of µc-SiH films. Bull. Mater. Sci. 8, 267–277 (1986). https://doi.org/10.1007/BF02744132

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  • DOI: https://doi.org/10.1007/BF02744132

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