Bulletin of Materials Science

, Volume 28, Issue 1, pp 49–54 | Cite as

Oriented growth of thin films of samarium oxide by MOCVD

Thin Films

Abstract

Thin films of Sm2O3 have been grown on Si(100) and fused quartz by low-pressure chemical vapour deposition using an adducted β-diketonate precursor. The films on quartz are cubic, with no preferred orientation at lower growth temperatures (∼ 550°C), while they grow with a strong (111) orientation as the temperature is raised (to 625°C). On Si(100), highly oriented films of cubic Sm2O3 at 625°C, and a mixture of monoclinic and cubic polymorphs of Sm2O3 at higher temperatures, are formed. Films grown on either substrate are very smooth and fine-grained. Infrared spectroscopic study reveals that films grown above 600° C are free of carbon.

Keywords

MOCVD thin films β-diketonate samarium oxide gate dielectric 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Baxter I, Drake S R, Hursthouse M B, Abdul Malik K M, McAleese J, Otway D J and Plakatouras J C 1995Inorg. Chem. 34 1384CrossRefGoogle Scholar
  2. Bauer E, 1962Trans. 9th vac. sym. AVS (ed.) G H Bancroft (New York: Macmillan) p. 35Google Scholar
  3. Belot J A, Wang A, McNeely R J, Liable-Sands L, Rheingold A L and Marks T J 1999Chem. Vap. Deposition 5 65CrossRefGoogle Scholar
  4. Berry A D, Holm R T, Fatemi M and Gaskill D K 1990J. Mater. Res. 5 1169CrossRefGoogle Scholar
  5. Bradley D C, Chudzynska H, Hursthouse M B and Motevalli M 1994Polyhedron 13 7CrossRefGoogle Scholar
  6. Drake S R, Lyons A, Otway D J, Slawin A M Z and Williams D J 1993J. Chem. Soc. Dalton Trans. 2379Google Scholar
  7. Drake S R, Hursthouse M B, Malik K M A, Miller S A S and Otway D J 1993Inorg. Chem. 32 4464CrossRefGoogle Scholar
  8. Fahlman B D and Baron A R 2000Adv. Mater. Opt. Electron. 10 223CrossRefGoogle Scholar
  9. Hogerheide M P, Boersma J and van Koten G 1996Coord. Chem. Rev. 155 87CrossRefGoogle Scholar
  10. Hong M, Kwo J, Kortan A R, Mannaerts J P and Sergent A M 1999Science 283 1897CrossRefGoogle Scholar
  11. Jun J H, Wang C H, Won D J and Choi D J 2002J. Korean Phys. Soc. 41 998Google Scholar
  12. Mehrotra R C, Bohra R and Gaur D P 1978Metal β-diketonates and allied derivatives (New York: Academic Press) Ch. 2Google Scholar
  13. Mikhelashvili V, Eisenstein G and Edelmann F 2002Appl. Phys. Lett. 80 2156CrossRefGoogle Scholar
  14. Ono H and Katsumata T 2001Appl. Phys. Lett. 78 1832CrossRefGoogle Scholar
  15. Rozhkov V A, Trusova A Y and Berezhnoy I G 1998Thin Solid Films 325 151CrossRefGoogle Scholar
  16. Sahana M B, Subbanna G N and Shivashankar S A 2002J. Appl. Phys. 92 6495CrossRefGoogle Scholar
  17. Sievers R E and Sadlowski J E 1978Science 201 217CrossRefGoogle Scholar
  18. Singh M P, Thakur C S, Shalini K, Bhat N and Shivashankar S A 2003Appl. Phys. Lett. 83 2889CrossRefGoogle Scholar
  19. Singh M P, Thakur C S, Shalini K, Banerjee S, Bhat N and Shivashankar S A 2004J. Appl. Phys. 96 5631CrossRefGoogle Scholar
  20. Smith H I and Flanders D C 1978Appl. Phys. Lett. 32 349CrossRefGoogle Scholar
  21. Urs U K, Shalini K, Cameron T S, Shivashankar S A and Guru Row T N 2001Acta Crystallogr.E57 m457Google Scholar
  22. Yoon J G, Oh H K and Lee S J 1999Phys. Rev. B60 2839Google Scholar

Copyright information

© Indian Academy of Sciences 2005

Authors and Affiliations

  1. 1.Materials Research CentreIndian Institute of ScienceBangaloreIndia

Personalised recommendations