Preparation of superconducting Y-Ba-Cu-O films by aerosol assisted chemical vapor deposition using liquid solution sources

Abstract

Superconducting Y-Ba-Cu-O thin films were prepared on MgO(100) substrate by aerosol-assisted chemical vapor deposition (AACVD). The process used a single solution source of Y, Ba and Cu Β-diketonates dissolved in tetrahydrofuran (THF). This liquid precursor was passed through an ultrasonic aerosol generator and transported into a CVD reactor where solvent and precursor evaporation and deposition occurred on heated substrate. Experimental details of this process were described and the effects of preheating temperature were studied in order to improve the quality of the deposited films. When the preheating temperature was 380 ‡C, films deposited at 815 ‡C had sharp transitions to the superconducting state about 88 K. The best superconducting films deposited by AACVD were prepared in oxygen partial pressure of 3.2 Torr at a deposition temperature of 815 ‡C.