Abstract
ZrO 2 films on silicon wafer were deposited by microwave plasma enhanced chemical vapour deposition technique using zirconium tetratert butoxide (ZTB). The structure and composition of the deposited layers were studied by fourier transform infrared spectroscopy (FTIR). The deposition rates were also studied. MOS capacitors fabricated using deposited oxides were used to characterize the electrical properties of ZrO 2 films. The films showed their suitability for microelectronic applications.
Similar content being viewed by others
References
Agnihotri O P, Jain S C, Poortmans J, Szlufcik J, Beaucarne G, Nijs J and Mertens R 2000Semicond. Sci. Technol. 15 R29
Balog M, Schieber M, Michman M and Patai S 1977Thin Solid Films 47 109
Cameron M A and George S M 1999Thin Solid Films 348 90
Hill W A and Coleman C C 1980Solid State Electron. 23 987
Houssa M, Naili M, Zhao C, Bender H, Heyns M M and Stesmans A 2001Semicond. Sci. Technol. 16 31
Hubbard D J and Schlom D J 1996J. Mater. Res. 11 2757
Kimura S, Murakami E, Miyake K, Warabisako T, Sunami H and Tokuyama T 1985J. Electrochem. Soc. 132 1460
Ngai T, Qi W J, Sharma R, Chen X, Lee J C and Banerjee S 2000Appl. Phys. Lett. 76 502
Qi W, Nieh R, Lee B H, Kang L, Jeon Y, Onishi K, Ngai T, Banerjee S and Lee J C 1999IEDM 145
Raoux S, Cheung D, Fodor M, Taylor W N and Fairbairn K 1997Plasma Sources Sci. Technol. 6 405
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Chatterjee, S., Samanta, S.K., Banerjee, H.D. et al. Metallo-organic compound-based plasma enhanced CVD of ZrO2 films for microelectronic applications. Bull Mater Sci 24, 579–582 (2001). https://doi.org/10.1007/BF02704004
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF02704004