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Electric field sensors based on MEMS technology

  • Letters
  • Published:
Journal of Electronics (China)

Abstract

The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on MicroElectroMechanical Systems (MEMS) technology are presented. They have different structures and vibrating modes. The volume is much smaller than other types of charge-induced EFSs such as field-mills. As miniaturizing, the induced signal is reduced enormously and a high sensitive circuit is needed to detect it. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Computer simulations for different structural parameters of the EFSs and vibrating methods have been carried out by Finite Element Method (FEM). It is proved that the new structures are realizable and the output signals are detectable.

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Authors and Affiliations

  1. State Key Lab of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, 100080, Beijing, China

    Gong Chao, Xia Shanhong, Deng Kai, Bai Qiang & Chen Shaofeng

Authors
  1. Gong Chao
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  2. Xia Shanhong
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  3. Deng Kai
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  4. Bai Qiang
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  5. Chen Shaofeng
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Additional information

Supported by the National Natural Science Foundation of China (No.60172001).

Communication author: Gong Chao, born in 1976, male, Ph.D. student, Institute of Electronics, Chinese Academy of Sciences, Beijing 100080, China.

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Cite this article

Gong, C., Xia, S., Deng, K. et al. Electric field sensors based on MEMS technology. J. of Electron.(China) 22, 443–448 (2005). https://doi.org/10.1007/BF02687917

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  • DOI: https://doi.org/10.1007/BF02687917

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