Conclusion
In this paper we have presented some results concerning phase diagrams of semiconductor compounds. We studied chalcogenide-based semiconductors which are promising materials for microelectronic applications.
We have shown that a basic thermodynamic approach can be attempted using the concepts of inorganic solid state chemistry, such as the approach used by Philips and van Vechten [17].
These phase diagram descriptions are very important for crystal growth, and an extended calphad approach to these multicomponent alloys is now necessary. Unfortunately, up to now few thermodynamic data are available, and measurements of chemical potentials, thermal capacity, and activities are necessary to model the phase equilibria.
The perspectives of this research concern:
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- composition—temperature—pressure phase equilibria,
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- metal—semiconductor interfaces stability (for electrical contacts applications),
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- semiconductor—semiconductor interfaces stability (for the stability of the devices).
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Additional information
Laboratoire de Physicochimie de la matière condensée, U.M.R. C.N.R.S. 5617, Université de Montpellier II, Sciences et techniques du Languedoc, Pl. E. Bataillon, 34095 Montpellier cedex, France. Published in Poroshkovaya Metallrgiya. Nos 1–2, pp. 3–14, January-February, 1997.
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Tedenac, J.C., Brun, G., Liautard, B. et al. Phase equilibria in multicomponent chalcogenides. Application of phase diagrams in semiconductor science. Powder Metall Met Ceram 36, 3–14 (1997). https://doi.org/10.1007/BF02684245
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DOI: https://doi.org/10.1007/BF02684245