Abstract
Germanium-film resistance microthermometers (Ø1.2 × 1.0 mm) are worked out and manufactured to be used in a wide range of temperatures from superlow to room temperatures. The thermometer characteristics are investigated within the temperature range of 0.03–300 K.
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V. F. Mitin, Yu. A. Tkhorik, and E. F. Venger,Microelectron. J.,28, 617–625 (1977).
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Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 73, No. 1, pp. 202–205, January–February, 2000.
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Mitin, V.F., Boltovets, N.S., Kholevchuk, V.V. et al. Germanium-film resistance microthermometers intended for operation within the temperature range of 0.03–300 K. J Eng Phys Thermophys 73, 202–204 (2000). https://doi.org/10.1007/BF02681698
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DOI: https://doi.org/10.1007/BF02681698