Abstract
We use low pressure MOVPE to grow indium antimonide films on groups of eight 3 inch GaAs wafers per run. The films are used for the production of magnetoresistive position sensors for the car industry. To meet the narrow specifications for automotive components, the standard deviation of the sheet resistivity, and the thickness of the films have been reduced below 1.5%. This uniformity is the result of an optimization process encompassing the determination of the best susceptor temperature and the optimum flow. The gas velocity was found to have a large impact on the uniformity of the layers. Rotation of the wafers and the use of an optimum gas velocity results in extremely uniform layers.
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Woelk, E., Jürgensen, H., Rolph, R. et al. Large scale production of indium antimonide film for position sensors in automobile engines. J. Electron. Mater. 24, 1715–1718 (1995). https://doi.org/10.1007/BF02676839
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DOI: https://doi.org/10.1007/BF02676839