Abstract
The composition and structure of plasma-polymerized coatings on the surface of a silicon single crystal are studied using methods of mass spectrometry and vibrational spectroscopy. It is established that the coating on the side of the surface is a set of ordered and unordered regions of branched chains of halogenocarbons and halogenohydrocarbons. A significant thickness of the coating-substrate transition layer contains silicon carbide and nitrogen dissolved in carbon. A great bulk of the coating is made up of amorphous carbon. The coating mass contains adsorbed gases that block reactive centers. Consideration is given to the special features of recording of vibrational spectra, the coating structure, its differences over the depth, the structural difference between the coating and a polymer film, and aging of the polymer material.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
H. Iasuda,J. Polym. Sci. Macromol. Rev.,16, 199–293 (1981).
V. V. Klubovich, Yu. D. Khamchukov, A. A. Litvinov, and N. F. Batrakov, in:Proc. of the Conf.” Plasma Physics and Plasma Technologies,” Sept. 1977 [in Russian], Minsk,3, 582–585 (1997).
V. V. Klubovich, V. D. Egorov, A. A. Litvinov, et al.,Dokl. Akad. Nauk Belarusi,38, 114–117 (1994).
V. M. Agranovich and D. L. Mills (eds.),Surface Polaritons. Electromagnetic Waves on Surfaces and Interfaces [Russian translation], Moscow (1985), pp. 155–159, 95–98.
G. Zerbi and M. Sacchi,Macromolecules,6, 692–699 (1973).
G. Masetti, F. Cabassi, G. Morelli, and G. Zerbi,Macromolecules,6, 700–707 (1973).
M. Dresselhaus and J. Dresselhaus, in:Light Scattering in Solids, M. Cardona and H. Guentherodt (eds.), Issue III [Russian translation], Moscow (1985), pp. 10–66.
M. Cardona (ed.),Light Scattering in Solids [Russian translation], Moscow (1973), pp. 253–254.
M. Born and E. Wolf,Fundamentals of Optics [Russian translation], Moscow (1973), pp. 54–57.
K. Nakamoto,IR and Raman Spectra of Inorganic and Coordination Compounds [Russian translation], Moscow (1991), p. 127.
A. Gordon and R. Ford,Chemist's Companion [Russian translation], Moscow (1976), p. 205.
L. M. Sverdlov, M. A. Kovner, and V. P. Krainov,Vibrational Spectra of Multiaomic Molecules [in Russian], Moscow (1976), p. 351–369.
E. Zenguil,Surface Physics [Russian translation], Moscow (1990), pp. 214–220.
V. Demtreder,Laser Spectroscopy. Basic Principles and Experimental Techniques [Russian translation], Moscow (1985), pp. 201–278.
Author information
Authors and Affiliations
Additional information
Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 66, No. 3, pp. 338–344, May–June, 1999.
Rights and permissions
About this article
Cite this article
Khamchukov, Y.D., Klubovich, V.V., Litvinov, A.A. et al. Vibrational spectra of a plasma-polymerized coating on the surface of a silicon single crystal. J Appl Spectrosc 66, 361–367 (1999). https://doi.org/10.1007/BF02676766
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02676766