Abstract
We considered the problem of and developed techniques for creating means of monochromatization of optical radiation with optimal technical-economic parameters for implementing spectral means of controlling various vacuum-plasma technological processes of applying and etching film coatings.
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References
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Additional information
Belarusian State University, 4, F. Skorina Ave., 220050, Minsk, Belarus. Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 65, No. 4, pp. 587–589, July–August, 1998.
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Burmakov, A.P., Labuda, A.A. & Nikiforenko, N.N. Monochromatization of radiation for spectral control of plasma technological processes. J Appl Spectrosc 65, 611–613 (1998). https://doi.org/10.1007/BF02675656
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DOI: https://doi.org/10.1007/BF02675656