Abstract
The review considers the present state of the art in the field of x-ray interferometry and its potential use for detecting and measuring nanometer-scale translations of microobjects. Basic physical models used for producing and investigating x-ray wave interference and moire patterns are presented.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
U. Bonse and M. Hart,Appl. Phys. Lett.,6, 155–156 (1965).
U. Bonse and M. Hart,Appl. Phys. Lett.,7, 99–100 (1965).
U. Bonse and M. Hart,X-Ray Interferometer Using Three Spaced Parallel Crystals, US Patent 344696 (1966).
N. Kato and S. Tanemura,Phys. Rev. Lett.,19, 22–24 (1967).
M. Hart,Proc. R. Soc. (London), A344, 1–21 (1975).
R. James,Optical Principles of X-Ray Diffraction [Russian translation], Moscow (1950), p. 10.
U. Bonse and M. Hart,Z. Phys.,188, 154–164 (1965).
M. Hart,Brit. J. Appl. Phys. (J. Phys. D), Ser. 2,1, 1405–1408 (1968).
U. Bonse and E. Te Kaat,Z. Phys.,243, 14–45 (1971).
D. K. Bowen, D. G. Chetwind and D. R. Schwarzenberger,Meas. Sci. Technol.,1, 107–119 (1990).
U. Bonse,Physika B,151, 7–21 (1988).
G. G. Avetisyan,Fizika, Mezhvuzovskii Sbornik Nauchnykh Trudov, Issue 4, 5–16 (1985).
U. Bonse and M. Hart,Z. Phys.,190, 455–467 (1966).
R. D. Deslattes,Appl. Phys. Lett.,15, 386–388 (1969).
S. Tanemura and A. R. Lang,Z. Naturforsch.,28a, 668–676, (1973).
G. G. Avetisyan, V. S. Arutyunyan and S. E. Bezigranyan,Fizika, Mezhvuzovskii Sbornik Nauchnykh Trudov, Issue 4, 17–30 (1985).
U. Bonse and M. Hart,Z. Phys.,194, 1–17 (1996).
A. Franks,X-Ray Interferometers, GB Patent 1578354 (1980).
U. Bonse and M. Hart,Acta Cryst., A24, 240–245 (1968).
N. Spielberg,Methods of Obtaining X-Ray Interference Patterns, US Patent 3393314 (1967).
Additional information
To whom correspondence should be addressed.
Institute of Electronics, National Academy of Sciences of Belarus, 22, Logoiskii Trakt, Minsk, 220841, Belarus. Translated from Zhurnal Prikladnoi Spekiroskopi, Vol. 66, No. 4, pp. 451–459, July–August, 1999.
Rights and permissions
About this article
Cite this article
Il'in, V.N., Kobets, N.A. & Leshkov, S.V. X-ray interferometers as a means of super-high-precision metrology (review). J Appl Spectrosc 66, 481–492 (1999). https://doi.org/10.1007/BF02675374
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02675374