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Noise investigation of ultraviolet laser induced grain structure in polyimide films

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Abstract

The ultraviolet laser treatment of polyimide films can lead to the formation of conductive area. The conductive layers show a carbon-rich grain structure. The heat treatment was carried out in air and nitrogen atmosphere. Morphology of conductive layers was investigated by scanning electron microscopy and transmission electron microscopy. On laser induced conductive layer, electrical noise investigation was carried out. Our investigation shows that laser induced layers have 1/f noise spectra. According to our results, conductive layers prepared in nitrogen atmosphere have better stability than those prepared in air.

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Authors and Affiliations

  1. Department of Electonic Technology, Technical University of Budapest, H-1521, Hungary

    Z. Kocsis, Z. S. Kincses, G. Ripka & I. Mojzes

  2. Research Group on Laser Physics of the Hungarian Academy of Science, Dóm tér 9, H-6720, Szeged, Hungary

    B. Hopp

Authors
  1. Z. Kocsis
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  2. Z. S. Kincses
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  3. B. Hopp
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  4. G. Ripka
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  5. I. Mojzes
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Kocsis, Z., Kincses, Z.S., Hopp, B. et al. Noise investigation of ultraviolet laser induced grain structure in polyimide films. J. Electron. Mater. 25, 549–551 (1996). https://doi.org/10.1007/BF02666634

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  • DOI: https://doi.org/10.1007/BF02666634

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