Skip to main content
Log in

Properties of lnAsxP1-x layer formed by P-As exchange reaction on (001)lnP surface exposed to As4 beam

  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

The P-As exchange reaction on InP surface exposed to As4 beam was studied using photoluminescence (PL) and x-ray diffraction measurements as well as ultra-high vacuum scanning tunneling microscopy observation. It was found that as high as 90–95% of P can be exchanged by As and that the average depth of exchange reaction increases with the increase of As exposure time, being as deep as 5.5 ML for a long exposure. The splitting of PL peak takes place when the reaction depth exceeds 2 ML and the number of the split subpeaks increases with the increase of As exposure time. The PL peak splitting originates from the fluctuation of well thickness, caused by formation of InAs islands for strain relief during the exchange reaction.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. J. Hergeth, D. Grützmacher, F. Reinhardt and P. Balk,J. Cryst. Growth 107, 537 (1992).

    Article  Google Scholar 

  2. A. Bensaoula,V. Rossignol,A.H. Bensaoula and A. Freundlich,J. Vac. Sci. Technol. B 11, 851 (1993).

    Article  CAS  Google Scholar 

  3. J. Böhrer, A. Krost and Bimberg,Appl. Phys. Lett. 60, 2258 (1992).

    Article  Google Scholar 

  4. H. Kamei and H. Hayashi,J. Cryst. Growth 107, 567 (1991).

    Article  CAS  Google Scholar 

  5. J. Camassel, J.P. Laurenti, S. Juillaguet, F. Reinhardt, K. Wolter, H. Kurz and D. Grützmacher,J. Cryst. Growth 107, 543 (1991).

    Article  CAS  Google Scholar 

  6. F. Genova, A. Antolini, L. Francesio, L. Gastaldi, C. Lamberti, C. Papuzza and C. Rigo,J. Cryst. Growth 120, 333 (1992).

    Article  CAS  Google Scholar 

  7. J. Yates, M.R. Aylett, S.D. Perrin and Spurdens,J. Cryst. Growth 124, 604 (1992).

    Article  CAS  Google Scholar 

  8. X.S. Jiang, A.R. Clawson and P.K.L. Yu,J. Cryst. Growth 124,604(1992).

    Article  Google Scholar 

  9. R. Shioda, H. Oyanagi, Y. Kuwahara, Y. Takeda, K Haga and H. Kamei,Jpn. J. Appl. Phys. 33, 5623 (1994).

    Article  CAS  Google Scholar 

  10. G. Landgren, P. Ojala and O. Ekstrom,J. Cryst. Growth 107, 573 (1991).

    Article  CAS  Google Scholar 

  11. R. Meyer, H. Hollfelder, H. Hardtdegen, B. Lengeler and H. Lüth,J. Cryst. Growth 124, 583 (1992).

    Article  CAS  Google Scholar 

  12. W. Seifert, D. Hessman, X. Liu and L. Samuelson,J. Appl. Phys. 75, 1501 (1994).

    Article  CAS  Google Scholar 

  13. J.R. Waldrop, R.W. Grant and E.A. Kraut,Appl. Phys. Lett. 54,1878(1989).

    Article  CAS  Google Scholar 

  14. K. Huang and B.W. Wessels,Appl. Phys. Lett. 52, 1155 (1988).

    Article  CAS  Google Scholar 

  15. A. Continenza, S. Massidda and A.J. Freeman,Phys. Rev. B 42,3469(1992).

    Article  Google Scholar 

  16. Ed. O. Madelung,Landolt-Börnstein Numerical Data and Functional Relationships in Science and Technology, V22, Springer-Verlag, 1987.

  17. C.A. Tran, R.A. Masut, J.L. Brebner, R. Leonelli, J.T. Gra-ham and P. Cova,J. Cryst. Growth 124, 596 (1992).

    Article  CAS  Google Scholar 

  18. H. Banvillet, E. Gil, R. Cadoret, P. Disseix, K. Ferdjani, A. Vasson, A.M. Vasson, A. Tabata, T. Benyattou and G. Guillot,J. Appl. Phys. 70, 1638 (1991).

    Article  CAS  Google Scholar 

  19. R.P. Schneider, Jr. and B.W. Wessels,Appl. Phys. Lett. 57, 1998 (1990).

    Article  CAS  Google Scholar 

  20. B.X. Yang and H. Hasegawa,Jpn. J. Appl. Phys. 32, 704 (1993).

    Article  CAS  Google Scholar 

  21. D.E. Aspnes, M.C. Tamargo, M.J.S.P. Brasil, R.E. Nahory and S.A. Schwarz,Appl. Phys. Lett. 64, 3279 (1994).

    Article  CAS  Google Scholar 

  22. Y.C. Chen, P.K. Bhattacharya and J. Singh,J. Vac. Sci. Technol. B 10, 769 (1992).

    Article  Google Scholar 

  23. L. He, B.X. Yang and H. Hasegawa, to be published else-where.

  24. C.W. Snyder, B.G. Orr, D. Kessler and L.M. Sander,Phys. Rev. Lett. 66, 3032 (1991).

    Article  CAS  Google Scholar 

  25. J. Tersoff and R.M. Tromp,Phys. Rev. Lett. 70, 2782 (1993).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yang, B.X., He, L. & Hasegawa, H. Properties of lnAsxP1-x layer formed by P-As exchange reaction on (001)lnP surface exposed to As4 beam. J. Electron. Mater. 25, 379–384 (1996). https://doi.org/10.1007/BF02666606

Download citation

  • Received:

  • Revised:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02666606

Key words

Navigation