Abstract
Electrical properties of molecular beam epitaxy “in-situ” grown Ag on (001) GaAs Schottky diodes were investigated. X-ray rocking curves show a (111) main peak for “in-situ” Ag grown at low temperature. During annealing, the main peak of Ag rotates from (111) to (200) to closely match that of the underlying GaAs lattice. The barrier height, 0.991 eV (determined by C-V measurement), decreases whereas doping concentration increases with increasing annealing temperature. Interdiffusion and the formation of some compound phases were also observed during annealing. A simple model, in which Ga dissociates from GaAs resulting in an increase in uncompensated ions at the metal-semiconductor interface, is proposed to explain the observation that carrier concentrations increase after annealing.
Similar content being viewed by others
References
A. Y. Cho and P. D. Dernier, J. Appl. Phys.49, 3328 (1978).
J. Massies and N. T. Linh, J. Cryst. Growth56, 25 (1982).
G. A. Prinz and J. J. Krebs, Appl. Phys. Lett.39, 397 (1981).
E. R. Ludeke, L. L. Chang and D. E. Eastman, J. Vac. Sci. Technol.21, 599 (1982).
J. R. Waldrop, J. Vac. Sci. Technol.B2, 445 (1984).
R. E. Viturro, J. L. Shaw, C. Mailhiot, L. J. Brillson and N. Tache, Appl. Phys. Lett.52, 2052 (1988).
R. E. Viturro, C. Mailhiot, J. L. Shaw and L. J. Brillson, J. Vac. Sci. Technol. A7, 855 (1989).
S. Chang, I. M. Vitomiro, L. J. Brillson, D. F. Rioux, P. D. Kirchner, G. D. Pettit and J. M. Woodall, J. Vac. Sci. Technol.B9, 2129 (1991).
M. Hong, H. S. Chen, J. R. Kwo, A. R. Kortan, J. P. Mannaerts, B. E. Weir and L. C. Feldman, J. Cryst. Growth,111, 984 (1991).
G. Hasnain, K. Tai, J. D. Wynn, Y. H. Wang, R. J. Fischer, M. Hong, B. E. Weir, G. J. Zydzik, J. P. Mannaerts, J. Gamelin and A. Y. Cho, Electron. Lett.26, 1590 (1990).
S. M. Sze, Physics of Semiconductor Device, Wiley (1981).
C. W. Wilmsen, ed., Physics and Chemistry of III-V Compound Semiconductor Interface (1985).
G. Lubberts, J. Appl. Phys.47, 365 (1976).
G. Y. Robinson, J. Vac. Sci. Technol.13, 884 (1976).
F. A. Padovani and R. Stratton, Solid-State Electron.13, 695 (1966).
C. R. Crowell and V. L. Rideout, Solid-State Electron.12, 89 (1969).
J. L. Freeouf and J. M. Woodall, Appl. Phys. Lett.39, 727 (1981).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Wang, Y.H., Houng, M.P., Chen, F.H. et al. An investigation of molecular beam epitaxy “in-situ” grown Ag/GaAs schottky diodes. J. Electron. Mater. 21, 911–915 (1992). https://doi.org/10.1007/BF02665548
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02665548