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The effect of ultrahigh magnetic fields on dopant distribution in CZ systems: A modeling study and comparison with asymptotic solutions

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Abstract

A mathematical representation is developed to describe the velocity, temperature, and dopant concentration fields in a magnetically-damped axisymmetric Czochralski (CZ) crystal growing system. Particular attention is paid to the near-field conditions, that is, to the dopant concen-tration profiles in the vicinity of the crystal surface, to the transient dopant distribution, and to the effect of very high magnetic fields up to 80 kilogauss.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Rooms 8-135 and 4-117, 02139, Cambridge, MA

    O. J. Ilegbusi (Research Associate) & J. Szekely (Professor of Materials Science)

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  1. O. J. Ilegbusi
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  2. J. Szekely
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Ilegbusi, O.J., Szekely, J. The effect of ultrahigh magnetic fields on dopant distribution in CZ systems: A modeling study and comparison with asymptotic solutions. Metall Trans A 20, 1637–1646 (1989). https://doi.org/10.1007/BF02663197

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  • DOI: https://doi.org/10.1007/BF02663197

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