Abstract
A comprehensive and quantitative method for extracting the important parameters of interface states is presented. The method is based on wavelength-, intensity-, and time-resolved surface photovoltage spectroscopy, as well as on measurements as a function of the thickness of an overlayer. Data analysis provides detailed information about interface state properties, including their energy position and distribution, density, and the transition probabilities, i.e. their thermal and optical cross sections. It is also possible to distinguish between surface and bulk states, and determine the spatial site of the states in the case of a heterostructure. Experimental examples for various III-V and II-VI compound semiconductors are given.
Similar content being viewed by others
References
S.M. Sze,Physics of Semiconductor Devices (New York: Wiley, 1985).
F. Capasso and G. Margaritondo, eds.,Herojunction Band Discontinuities (Amsterdam: North-Holland, 1987), and ref- erences therein.
D.K. Schroder,Semiconductor Materials andDevice Charac- terization (New York: Wiley, 1990).
H. Deuling, E. Klausmann and A. Goetzberger,Sol. State Elect. 15,559(1973).
J. Lagowski, C. L. Balestra and H. C. Gatos,Surf. Sci. 29,203 (1972).
D.V. Lang,J. Appl. Phys. 45, 3023 (1974).
W.D. Eades and R.M. Swanson,J. Appl. Phys. 56, 1744 (1984).
C.W. Wang, C.H. Wu and J.L. Boone,J. Appl. Phys. 73, 760 (1993).
L. J. Brillson,Surf. Sci. Rep. 2, 123 (1982).
F. Sanh, F.P. Gills and J.L. Gray,Sol. State. Elect. 35, 311 (1992).
V. Grivickas, J. Linnors and J.A. Tellefsen,J. Appl. Phys. 35, 299(1992).
J. Waldmeyer,J. Appl. Phys. 63, 1977 (1988).
V.l. Migorodskii, V.A. Sablikov and A.L. Filatov,Fiz. Tekh. Poluprovodn. 27, 81 (1993) [Semiconductors 27, 42 (1993)].
G. Breglio, A. Cutolo, P. Spirito and L. Zeni,IEEE Elect. Dev. Lett. 14, 487 (1993).
ASTM standard No. F391-78, (Philadelphia, PA: American Society for Testing and Materials, 1978).
J. Lagowski, P. Edelman, M. Dexter and W. Henley,Semicond. Sci. Technol. 7, A185 (1992).
V. Murali, A. T. Wu, A. K. Chatterjee and D. B. Fraser,IEEE Trans. Semicond. Manufacturing 5, 214 (1992).
J. Lagowski, P. Edelman and A. Morawski,Semicond. Sci. Technol. 7, A211 (1992).
H.V. Estrada,Proc. IEEE South East Conf. ’92,1,163 (1992).
H. C. Gatos and J. Lagowski,J. Vac. Sci. Technol. 10, 130 (1973).
A. L. Musatov and S. Yu. Smirnov,Surf. Sci., 269/270,1048 (1992).
J. Szuber,Appl. Surf. Sci. 55, 143 (1992).
L. Burstein, J. Bregman and Y. Shapira,J. Appl. Phys. 69, 2312 (1991).
B. Goldstein and D.J. Szostak,Surf. Sci. 99, 235 (1980).
W. Thomson (Lord Kelvin),Phil. Mag. 5, 46 (1898).
L. Burstein, J. Bregman and Y. Shapira,J. Appl. Phys. 69, 2312 (1991).
L. Kronik, L. Burstein, Y. Shapira and M. Oron,Appl. Phys. Lett. 63, 60 (1993).
M. Leibovitch, L. Kronik, E. Fefer and Y. Shapira,Phys. Rev. B50, 1739 (1994).
W. Shockley and W. T. Read,Phys. Rev. 87, 835 (1952).
L. Kronik and Y. Shapira,J. Vac. Sci. Technol. All, 3081 (1993).
M. Leibovitch, L. Kronik, E. Fefer, L. Burstein, V. Korobov and Y. Shapira, unpublished.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Kronik, L., Leibovitch, M., Fefer, E. et al. Quantitative surface photovoltage spectroscopy of semiconductor interfaces. J. Electron. Mater. 24, 379–385 (1995). https://doi.org/10.1007/BF02659702
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF02659702